Patents per Year
Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7827930 | Apparatus for electroless deposition of metals onto semiconductor substrates | Dmitry Lubomirsky, Arulkumar Shanmugasundram, Russell C. Ellwanger, Ian Pancham, Timothy Weidman | 2010-11-09 | $8,686,000 |
| 7497767 | Vibration damping during chemical mechanical polishing | Hung Chih Chen, Shijian Li, John M. White, Ramin Emami, Fred C. Redeker +1 more | 2009-03-03 | $11,197,000 |
| 7323058 | Apparatus for electroless deposition of metals onto semiconductor substrates | Dmitry Lubomirsky, Arulkumar Shanmugasundram, Russell C. Ellwanger, Ian Pancham | 2008-01-29 | $14,525,000 |
| 6848980 | Vibration damping in a carrier head | Hung Chih Chen, Steven M. Zuniga | 2005-02-01 | $25,693,000 |