{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Vibration damping during chemical mechanical polishing", "item": "https://www.patentleaderboard.com/patent/7497767"}]}
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Vibration damping during chemical mechanical polishing

US Patent 7497767 · Granted Mar 3, 2009

Estimated economic value: $11,197,000 ⓘ

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