Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7247080 | Feedback controlled polishing processes | Doyle E. Bennett, Boguslaw A. Swedek | 2007-07-24 |
| 7223323 | Multi-chemistry plating system | Michael Yang, Ming Xi, Russell C. Ellwanger, Eric Bramwell Britcher, Bernardo Donoso +11 more | 2007-05-29 |
| 7205233 | Method for forming CoWRe alloys by electroless deposition | Sergey Lopatin, Dmitry Lubomirsky, Ian Pancham | 2007-04-17 |
| 7201936 | Method of feedback control of sub-atmospheric chemical vapor deposition processes | Alexander T. Schwarm, Rong Pan, Manuel A. Hernandez, Amna Mohammad | 2007-04-10 |
| 7160739 | Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles | Alexander T. Schwarm, Gopalakrishna B. Prabhu | 2007-01-09 |
| 7082345 | Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities | Helen R. Armer, Alexander T. Schwarm | 2006-07-25 |
| 7047099 | Integrating tool, module, and fab level control | Alexander T. Schwarm | 2006-05-16 |
| 7024268 | Feedback controlled polishing processes | Doyle E. Bennett, Boguslaw A. Swedek | 2006-04-04 |
| 6999836 | Method, system, and medium for handling misrepresentative metrology data within an advanced process control system | Alexander T. Schwarm, Jacques Seror, Yuri Kokotov, Efim Entin | 2006-02-14 |
| 6913938 | Feedback control of plasma-enhanced chemical vapor deposition processes | Alexander T. Schwarm, Ilias Iliopoulos, Alexander Parkhomovsky, Martin Jay Seamons | 2005-07-05 |
| 6887124 | Method of polishing and cleaning substrates | Jay D. Pinson, II | 2005-05-03 |
| 6625513 | Run-to-run control over semiconductor processing tool based upon mirror image target | Dimitris Lymberopoulos, Terry Reiss | 2003-09-23 |
| 6413145 | System for polishing and cleaning substrates | Jay D. Pinson, II | 2002-07-02 |
| 6350188 | Drive system for a carrier head support structure | William R. Bartlett, Jim Tobin | 2002-02-26 |
| 6244931 | Buffer station on CMP system | Jay D. Pinson, II, Arnold J. Aronson, Rodney Lum | 2001-06-12 |