Patents per Year
Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6872129 | Edge contact loadcup | — | 2005-03-29 | $29,399,000 |
| 6716086 | Edge contact loadcup | — | 2004-04-06 | $31,300,000 |
| 6361648 | Wafer transfer station for a chemical mechanical polisher | — | 2002-03-26 | $33,068,000 |
| 6350188 | Drive system for a carrier head support structure | William R. Bartlett, Arulkumar Shanmugasundram | 2002-02-26 | $53,340,000 |
| 6156124 | Wafer transfer station for a chemical mechanical polisher | — | 2000-12-05 | $73,043,000 |