Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872129 | Edge contact loadcup | — | 2005-03-29 |
| 6716086 | Edge contact loadcup | — | 2004-04-06 |
| 6361648 | Wafer transfer station for a chemical mechanical polisher | — | 2002-03-26 |
| 6350188 | Drive system for a carrier head support structure | William R. Bartlett, Arulkumar Shanmugasundram | 2002-02-26 |
| 6156124 | Wafer transfer station for a chemical mechanical polisher | — | 2000-12-05 |