Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6506099 | Driving a carrier head in a wafer polishing system | — | 2003-01-14 |
| 6350188 | Drive system for a carrier head support structure | Arulkumar Shanmugasundram, Jim Tobin | 2002-02-26 |
| 6245680 | Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning | Norm Shendon | 2001-06-12 |
| 6136715 | Circumferentially oscillating carousel apparatus for sequentially polishing substrates | Norm Shendon | 2000-10-24 |
| 5951373 | Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning | Norm Shendon | 1999-09-14 |
| 5899801 | Method and apparatus for removing a substrate from a polishing pad in a chemical mechanical polishing system | Robert D. Tolles, James Nystrom, Jeffrey Marks, Victor Belitsky | 1999-05-04 |
| 5775983 | Apparatus and method for conditioning a chemical mechanical polishing pad | Norman Shendon | 1998-07-07 |