| 7255632 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion |
Robert D. Tolles, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee |
2007-08-14 |
$16,337,000 |
| 7238090 |
Polishing apparatus having a trough |
Robert D. Tolles, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee |
2007-07-03 |
$46,647,000 |
| 7097544 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion |
Robert D. Tolles, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee |
2006-08-29 |
$18,591,000 |
| 6503134 |
Carrier head for a chemical mechanical polishing apparatus |
— |
2003-01-07 |
$25,673,000 |
| 6336851 |
Substrate belt polisher |
— |
2002-01-08 |
$263,411,000 |
| 6267656 |
Carrier head for a chemical mechanical polishing apparatus |
— |
2001-07-31 |
$84,886,000 |
| 6245680 |
Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning |
William R. Bartlett |
2001-06-12 |
$57,514,000 |
| 6136715 |
Circumferentially oscillating carousel apparatus for sequentially polishing substrates |
William R. Bartlett |
2000-10-24 |
$85,890,000 |
| 6126517 |
System for chemical mechanical polishing having multiple polishing stations |
Robert D. Tolles, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee |
2000-10-03 |
$78,095,000 |
| 6080046 |
Underwater wafer storage and wafer picking for chemical mechanical polishing |
Ilya Perlov, Eugene Gantvarg, Harry Q. Lee, Robert D. Tolles, Sasson Somekh |
2000-06-27 |
$92,951,000 |
| 6051499 |
Apparatus and method for distribution of slurry in a chemical mechanical polishing system |
Robert D. Tolles, William L. Guthrie, Jeffrey Marks, Tsungnan Cheng, Semyon Spektor +1 more |
2000-04-18 |
$96,811,000 |
| 6019671 |
Carrier head for a chemical/mechanical polishing apparatus and method of polishing |
— |
2000-02-01 |
$104,078,000 |
| 5961372 |
Substrate belt polisher |
— |
1999-10-05 |
$73,011,000 |
| 5951373 |
Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning |
William R. Bartlett |
1999-09-14 |
$62,682,000 |
| 5913718 |
Head for a chemical mechanical polishing apparatus |
— |
1999-06-22 |
$117,322,000 |
| 5899800 |
Chemical mechanical polishing apparatus with orbital polishing |
— |
1999-05-04 |
$46,899,000 |
| 5820448 |
Carrier head with a layer of conformable material for a chemical mechanical polishing system |
Sam Shamouilian |
1998-10-13 |
$26,272,000 |
| 5795215 |
Method and apparatus for using a retaining ring to control the edge effect |
William L. Guthrie, Tsungnan Cheng, Sen-Hou Ko, Harry Q. Lee, Michael Sherwood |
1998-08-18 |
$47,752,000 |
| 5738574 |
Continuous processing system for chemical mechanical polishing |
Robert D. Tolles, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee |
1998-04-14 |
$42,066,000 |
| 5709593 |
Apparatus and method for distribution of slurry in a chemical mechanical polishing system |
William L. Guthrie, Semyon Spektor, Ivan A. Ocanada |
1998-01-20 |
$49,342,000 |
| 5681215 |
Carrier head design for a chemical mechanical polishing apparatus |
Michael Sherwood, Harry Q. Lee, Semyon Spektor |
1997-10-28 |
$145,989,000 |
| 5643053 |
Chemical mechanical polishing apparatus with improved polishing control |
— |
1997-07-01 |
$28,802,000 |
| 5582534 |
Orbital chemical mechanical polishing apparatus and method |
Dennis R. Smith |
1996-12-10 |
$24,149,000 |
| 5205082 |
Wafer polisher head having floating retainer ring |
Kenneth C. Struven, Robert J. Kolenkow |
1993-04-27 |
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