Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7255632 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Robert D. Tolles, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2007-08-14 |
| 7238090 | Polishing apparatus having a trough | Robert D. Tolles, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2007-07-03 |
| 7097544 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Robert D. Tolles, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2006-08-29 |
| 6503134 | Carrier head for a chemical mechanical polishing apparatus | — | 2003-01-07 |
| 6336851 | Substrate belt polisher | — | 2002-01-08 |
| 6267656 | Carrier head for a chemical mechanical polishing apparatus | — | 2001-07-31 |
| 6245680 | Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning | William R. Bartlett | 2001-06-12 |
| 6136715 | Circumferentially oscillating carousel apparatus for sequentially polishing substrates | William R. Bartlett | 2000-10-24 |
| 6126517 | System for chemical mechanical polishing having multiple polishing stations | Robert D. Tolles, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2000-10-03 |
| 6080046 | Underwater wafer storage and wafer picking for chemical mechanical polishing | Ilya Perlov, Eugene Gantvarg, Harry Q. Lee, Robert D. Tolles, Sasson Somekh | 2000-06-27 |
| 6051499 | Apparatus and method for distribution of slurry in a chemical mechanical polishing system | Robert D. Tolles, William L. Guthrie, Jeffrey Marks, Tsungnan Cheng, Semyon Spektor +1 more | 2000-04-18 |
| 6019671 | Carrier head for a chemical/mechanical polishing apparatus and method of polishing | — | 2000-02-01 |
| 5961372 | Substrate belt polisher | — | 1999-10-05 |
| 5951373 | Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning | William R. Bartlett | 1999-09-14 |
| 5913718 | Head for a chemical mechanical polishing apparatus | — | 1999-06-22 |
| 5899800 | Chemical mechanical polishing apparatus with orbital polishing | — | 1999-05-04 |
| 5820448 | Carrier head with a layer of conformable material for a chemical mechanical polishing system | Sam Shamouilian | 1998-10-13 |
| 5795215 | Method and apparatus for using a retaining ring to control the edge effect | William L. Guthrie, Tsungnan Cheng, Sen-Hou Ko, Harry Q. Lee, Michael Sherwood | 1998-08-18 |
| 5738574 | Continuous processing system for chemical mechanical polishing | Robert D. Tolles, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 1998-04-14 |
| 5709593 | Apparatus and method for distribution of slurry in a chemical mechanical polishing system | William L. Guthrie, Semyon Spektor, Ivan A. Ocanada | 1998-01-20 |
| 5681215 | Carrier head design for a chemical mechanical polishing apparatus | Michael Sherwood, Harry Q. Lee, Semyon Spektor | 1997-10-28 |
| 5643053 | Chemical mechanical polishing apparatus with improved polishing control | — | 1997-07-01 |
| 5582534 | Orbital chemical mechanical polishing apparatus and method | Dennis R. Smith | 1996-12-10 |
| 5205082 | Wafer polisher head having floating retainer ring | Kenneth C. Struven, Robert J. Kolenkow | 1993-04-27 |