Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6523557 | Megasonic bath | — | 2003-02-25 |
| 6209555 | Substrate cassette for ultrasonic cleaning | — | 2001-04-03 |
| 5383488 | Apparatus and method for protecting chemical bath seals | — | 1995-01-24 |
| 5205082 | Wafer polisher head having floating retainer ring | Norm Shendon, Robert J. Kolenkow | 1993-04-27 |
| 4918870 | Floating subcarriers for wafer polishing apparatus | Walter Torbert, Robert E. Lorenzini, Anthony C. Bonora | 1990-04-24 |