Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9664909 | Monolithic optical beam splitter with focusing lens | Bret Whiteside, Patrick J. Czarnota, Juergen Reich | 2017-05-30 |
| 9182358 | Multi-spot defect inspection system | Zhiwei Xu, Christian Wolters, Juergen Reich, Bret Whiteside, Guoheng Zhao +3 more | 2015-11-10 |
| 5820448 | Carrier head with a layer of conformable material for a chemical mechanical polishing system | Norm Shendon | 1998-10-13 |