Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6051499 | Apparatus and method for distribution of slurry in a chemical mechanical polishing system | Robert D. Tolles, William L. Guthrie, Jeffrey Marks, Tsungnan Cheng, Semyon Spektor +1 more | 2000-04-18 |
| 5709593 | Apparatus and method for distribution of slurry in a chemical mechanical polishing system | William L. Guthrie, Semyon Spektor, Norm Shendon | 1998-01-20 |