Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE44491 | Chemical mechanical polishing retaining ring | Michael Sherwood, Harry Q. Lee | 2013-09-10 |
| 8079894 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Robert D. Tolles, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2011-12-20 |
| 7614939 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Robert D. Tolles, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2009-11-10 |
| 7101261 | Fluid-pressure regulated wafer polishing head | Michael Sherwood, Harry Q. Lee | 2006-09-05 |
| 6716094 | Chemical mechanical polishing retaining ring | Michael Sherwood, Harry Q. Lee | 2004-04-06 |
| 6652368 | Chemical mechanical polishing carrier head | Michael Sherwood, Harry Q. Lee | 2003-11-25 |
| 6513848 | Hydraulically actuated wafer clamp | John Hearne, Bryan Von Lossberg | 2003-02-04 |
| 6443824 | Fluid-pressure regulated wafer polishing head | Michael Sherwood, Harry Q. Lee | 2002-09-03 |
| 6290577 | Fluid pressure regulated wafer polishing head | Michael Sherwood, Harry Q. Lee | 2001-09-18 |
| 6120608 | Workpiece support platen for semiconductor process chamber | James S. Papanu, David Palagashvili | 2000-09-19 |
| 6024630 | Fluid-pressure regulated wafer polishing head | Michael Sherwood, Harry Q. Lee | 2000-02-15 |
| 5775983 | Apparatus and method for conditioning a chemical mechanical polishing pad | William R. Bartlett | 1998-07-07 |
| 5624299 | Chemical mechanical polishing apparatus with improved carrier and method of use | — | 1997-04-29 |