Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7086933 | Flexible polishing fluid delivery system | Lidia Vereen, Peter Skarpelos, Brian Downum, Patrick A. Williams, Terry Kin Ting Ko +3 more | 2006-08-08 |
| 6701381 | Data processing system and development method | Ronan Rooney | 2004-03-02 |
| 6513848 | Hydraulically actuated wafer clamp | Norman Shendon, Bryan Von Lossberg | 2003-02-04 |
| 6348124 | Delivery of polishing agents in a wafer processing system | Matthew G. Garbett, Robert D. Tolles, Manoocher Birang | 2002-02-19 |
| 6027574 | Method of drying a substrate by lowering a fluid surface level | Boris Fishkin, Robert B. Lowrance | 2000-02-22 |
| 5884640 | Method and apparatus for drying substrates | Boris Fishkin, Robert B. Lowrance | 1999-03-23 |
| 5745946 | Substrate processing system | David L. Thrasher, Lynn Ryle, Robert M. Ruppell, Wilbur C. Krussell, Gary D. Youre | 1998-05-05 |
| 5727332 | Contamination control in substrate processing system | David L. Thrasher, Lynn Ryle | 1998-03-17 |
| 5566466 | Spindle assembly with improved wafer holder | — | 1996-10-22 |
| 5358760 | Process for producing solid bricks from fly ash, bottom ash, lime, gypsum, and calcium carbonate | Tresea Furlong | 1994-10-25 |