| 7086933 |
Flexible polishing fluid delivery system |
Lidia Vereen, Peter Skarpelos, Brian Downum, Patrick A. Williams, Terry Kin Ting Ko +3 more |
2006-08-08 |
| 6701381 |
Data processing system and development method |
Ronan Rooney |
2004-03-02 |
| 6513848 |
Hydraulically actuated wafer clamp |
Norman Shendon, Bryan Von Lossberg |
2003-02-04 |
| 6348124 |
Delivery of polishing agents in a wafer processing system |
Matthew G. Garbett, Robert D. Tolles, Manoocher Birang |
2002-02-19 |
| 6027574 |
Method of drying a substrate by lowering a fluid surface level |
Boris Fishkin, Robert B. Lowrance |
2000-02-22 |
| 5884640 |
Method and apparatus for drying substrates |
Boris Fishkin, Robert B. Lowrance |
1999-03-23 |
| 5745946 |
Substrate processing system |
David L. Thrasher, Lynn Ryle, Robert M. Ruppell, Wilbur C. Krussell, Gary D. Youre |
1998-05-05 |
| 5727332 |
Contamination control in substrate processing system |
David L. Thrasher, Lynn Ryle |
1998-03-17 |
| 5566466 |
Spindle assembly with improved wafer holder |
— |
1996-10-22 |
| 5358760 |
Process for producing solid bricks from fly ash, bottom ash, lime, gypsum, and calcium carbonate |
Tresea Furlong |
1994-10-25 |
