| 6003185 |
Hesitation free roller |
Albert M. Saenz, Wilbur C. Krusell, William G. Drapak |
1999-12-21 |
| 5975736 |
Scrubber control system |
Mark Simmons, Martin J. McGrath |
1999-11-02 |
| 5840129 |
Hesitation free roller |
Albert M. Saenz, Wilbur C. Krusell, William G. Drapak |
1998-11-24 |
| 5762084 |
Megasonic bath |
Wilbur C. Krusell, Lynn Ryle |
1998-06-09 |
| 5745946 |
Substrate processing system |
Lynn Ryle, Robert M. Ruppell, John Hearne, Wilbur C. Krussell, Gary D. Youre |
1998-05-05 |
| 5727332 |
Contamination control in substrate processing system |
John Hearne, Lynn Ryle |
1998-03-17 |
| 5606251 |
Method and apparatus for detecting a substrate in a substrate processing system |
Lynn Ryle, Robert M. Ruppell, Martin J. McGrath |
1997-02-25 |
| 5548505 |
Scrubber control system |
Mark Simmons, Martin J. McGrath |
1996-08-20 |
| 5475889 |
Automatically adjustable brush assembly for cleaning semiconductor wafers |
Lynn Ryle |
1995-12-19 |
| 4616683 |
Particle-free dockable interface for integrated circuit processing |
Barclay J. Tullis, Mihir Parikh, Mark Johnston |
1986-10-14 |
| 4532970 |
Particle-free dockable interface for integrated circuit processing |
Barclay J. Tullis, Mihir Parikh, Mark Johnston |
1985-08-06 |