Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5975736 | Scrubber control system | Mark Simmons, David L. Thrasher | 1999-11-02 |
| 5606251 | Method and apparatus for detecting a substrate in a substrate processing system | Lynn Ryle, Robert M. Ruppell, David L. Thrasher | 1997-02-25 |
| 5548505 | Scrubber control system | Mark Simmons, David L. Thrasher | 1996-08-20 |
| 5483138 | System and method for automated positioning of a substrate in a processing chamber | Simon Shmookler, Andrew G. Weinberg | 1996-01-09 |