Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5483138 | System and method for automated positioning of a substrate in a processing chamber | Andrew G. Weinberg, Martin J. McGrath | 1996-01-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5483138 | System and method for automated positioning of a substrate in a processing chamber | Andrew G. Weinberg, Martin J. McGrath | 1996-01-09 |