| 6334229 |
Apparatus for cleaning edges of contaminated substrates |
Mansour Moinpour, Hoang T. Nguyen, Mohsen Salek, Young C. Park, Tom Bramblett +3 more |
2002-01-01 |
| 6272712 |
Brush box containment apparatus |
Thomas R. Gockel, Lorin Olson, Brett A. Whitelaw, Michael Ravkin |
2001-08-14 |
| 6119295 |
Brush assembly apparatus |
Thomas R. Gockel, Lorin Olson, Brett A. Whitelaw |
2000-09-19 |
| 6059889 |
Method for processing a substrate using a system having a roller with treading |
Alan J. Jensen, Norman Mertke, William Dyson, Jr., Patrick Paino |
2000-05-09 |
| 5924154 |
Brush assembly apparatus |
Thomas R. Gockel, Lorin Olson, Brett A. Whitelaw, Michael Ravkin |
1999-07-20 |
| 5862560 |
Roller with treading and system including the same |
Alan J. Jensen, Norman Mertke, William Dyson, Jr., Patrick Paino |
1999-01-26 |
| 5861066 |
Method and apparatus for cleaning edges of contaminated substrates |
Mansour Moinpour, Hoang T. Nguyen, Mohsen Salek, Young C. Park, Tom Bramblett +3 more |
1999-01-19 |
| 5809832 |
Roller positioning apparatus |
Thomas R. Gockel, Lorin Olson, Brett A. Whitelaw |
1998-09-22 |
| 5794299 |
Containment apparatus |
Thomas R. Gockel, Lorin Olson, Brett A. Whitelaw |
1998-08-18 |
| 5762084 |
Megasonic bath |
Wilbur C. Krusell, David L. Thrasher |
1998-06-09 |
| 5745946 |
Substrate processing system |
David L. Thrasher, Robert M. Ruppell, John Hearne, Wilbur C. Krussell, Gary D. Youre |
1998-05-05 |
| 5727332 |
Contamination control in substrate processing system |
David L. Thrasher, John Hearne |
1998-03-17 |
| 5606251 |
Method and apparatus for detecting a substrate in a substrate processing system |
Robert M. Ruppell, David L. Thrasher, Martin J. McGrath |
1997-02-25 |
| 5475889 |
Automatically adjustable brush assembly for cleaning semiconductor wafers |
David L. Thrasher |
1995-12-19 |
