Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7044838 | Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring | Gerard S. Maloney, Scott Chin, John Geraghty, Tanlin Dickey | 2006-05-16 |
| 6309290 | Chemical mechanical polishing head having floating wafer retaining ring and wafer carrier with multi-zone polishing pressure control | Huey-Ming Wang, Gerard Moloney, Scott Chin, John Geraghty, Tanlin Dickey | 2001-10-30 |
| 6231428 | Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring | Gerard S. Maloney, Scott Chin, John Geraghty, Tanlin Dickey | 2001-05-15 |
| 6059889 | Method for processing a substrate using a system having a roller with treading | Alan J. Jensen, Norman Mertke, Lynn Ryle, Patrick Paino | 2000-05-09 |
| 5862560 | Roller with treading and system including the same | Alan J. Jensen, Norman Mertke, Lynn Ryle, Patrick Paino | 1999-01-26 |