Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293919 | Alternating etch and passivation process | Seongjun Heo, Jengyi Yu, Chen-Wei Liang, Samantha Tan | 2025-05-06 |
| 11848212 | Alternating etch and passivation process | Seongjun Heo, Jengyi Yu, Chen-Wei Liang, Samantha Tan | 2023-12-19 |
| 11551938 | Alternating etch and passivation process | Seongjun Heo, Jengyi Yu, Chen-Wei Liang, Samantha Tan | 2023-01-10 |
| 10134600 | Dielectric contact etch | Leonid Romm, Xin Zhang, Gerardo Delgadino | 2018-11-20 |
| 9779956 | Hydrogen activated atomic layer etching | Xin Zhang, Gerardo Delgadino, Daniel Le | 2017-10-03 |
| 8906810 | Pulsed dielectric etch process for in-situ metal hard mask shape control to enable void-free metallization | Ananth Indrakanti, Bhaskar Nagabhirava, Tom Choi | 2014-12-09 |
| 7479457 | Gas mixture for removing photoresist and post etch residue from low-k dielectric material and method of use thereof | Cristian Paduraru, David Schaefer, Robert Charatan, Tom Choi | 2009-01-20 |
| 6939207 | Method and apparatus for controlling CMP pad surface finish | Mario Stella, Eugene Zhao, Peter Renteln, Jeffrey Farber | 2005-09-06 |
| 6875091 | Method and apparatus for conditioning a polishing pad with sonic energy | Allan M. Radman, Helmuth Treichel, Robert G. Boehm, Jr., Michael S. Lacy, Eric A. Dunton | 2005-04-05 |
| 6769970 | Fluid venting platen for optimizing wafer polishing | Travis R. Taylor | 2004-08-03 |
| 6752698 | Method and apparatus for conditioning fixed-abrasive polishing pads | Peter Renteln, David S. Lamb | 2004-06-22 |
| 6645052 | Method and apparatus for controlling CMP pad surface finish | Mario Stella, Eugene Zhao, Peter Renteln, Jeffrey Farber | 2003-11-11 |
| 6634936 | Chemical mechanical planarization or polishing pad with sections having varied groove patterns | Brian Thornton | 2003-10-21 |
| 6585579 | Chemical mechanical planarization or polishing pad with sections having varied groove patterns | Brian Thornton | 2003-07-01 |
| 6315634 | Method of optimizing chemical mechanical planarization process | Cangshan Xu | 2001-11-13 |
| 6261168 | Chemical mechanical planarization or polishing pad with sections having varied groove patterns | Brian Thornton | 2001-07-17 |
| 6059889 | Method for processing a substrate using a system having a roller with treading | Norman Mertke, William Dyson, Jr., Lynn Ryle, Patrick Paino | 2000-05-09 |
| 5862560 | Roller with treading and system including the same | Norman Mertke, William Dyson, Jr., Lynn Ryle, Patrick Paino | 1999-01-26 |
| 5784787 | Sheet metal penetrating tool | — | 1998-07-28 |