Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8293023 | System and method for monitoring wafer stress | John C. Valcore, Jr., Mark Kawaguchi | 2012-10-23 |
| 8287656 | Methods for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscus | G. Grant Peng, Katrina Mikhaylich | 2012-10-16 |
| 8051863 | Methods of and apparatus for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscus | G. Grant Peng, Katrina Mikhaylich | 2011-11-08 |
| 7479457 | Gas mixture for removing photoresist and post etch residue from low-k dielectric material and method of use thereof | Alan J. Jensen, David Schaefer, Robert Charatan, Tom Choi | 2009-01-20 |