Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8614149 | Critical dimension reduction and roughness control | Sangheon Lee, Dae-Han Choi, Jisoo Kim, Peter Cirigliano, Zhisong Huang +1 more | 2013-12-24 |
| 8529728 | System and method for critical dimension reduction and pitch reduction | — | 2013-09-10 |
| 8340827 | Methods for controlling time scale of gas delivery into a processing chamber | Gunsu Yun, Iqbal Shareef, Kurt M. Jorgensen | 2012-12-25 |
| 8268118 | Critical dimension reduction and roughness control | Sangheon Lee, Dae-Han Choi, Jisoo Kim, Peter Cirigliano, Zhisong Huang +1 more | 2012-09-18 |
| 7695632 | Critical dimension reduction and roughness control | Sangheon Lee, Dae-Han Choi, Jisoo Kim, Peter Cirigliano, Zhisong Huang +1 more | 2010-04-13 |
| 7479457 | Gas mixture for removing photoresist and post etch residue from low-k dielectric material and method of use thereof | Cristian Paduraru, Alan J. Jensen, David Schaefer, Tom Choi | 2009-01-20 |
| 7442649 | Etch with photoresist mask | Jisoo Kim, Sangheon Lee, Binet Worsham, S.M. Reza Sadjadi | 2008-10-28 |
| 7427458 | System and method for critical dimension reduction and pitch reduction | — | 2008-09-23 |
| 7205226 | Sacrificial layer for protection during trench etch | David Schaefer | 2007-04-17 |
| 7014539 | Method and apparatus for minimizing agglomerate particle size in a polishing fluid | — | 2006-03-21 |
| 7004825 | Apparatus and associated method for conditioning in chemical mechanical planarization | Travis R. Taylor, Robert Luke Anderson | 2006-02-28 |
| 6958005 | Polishing pad conditioning system | — | 2005-10-25 |
| 6955588 | Method of and platen for controlling removal rate characteristics in chemical mechanical planarization | Robert Luke Anderson | 2005-10-18 |
| 6935938 | Multiple-conditioning member device for chemical mechanical planarization conditioning | Yehiel Gotkis | 2005-08-30 |
| 6899594 | Relative lateral motion in linear CMP | Dae J. Lim, Peter Norton | 2005-05-31 |
| 6752898 | Method and apparatus for an air bearing platen with raised topography | Robert Luke Anderson, Travis R. Taylor | 2004-06-22 |