Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8989888 | Automatic fault detection and classification in a plasma processing system and methods thereof | Vijayakumar C. Venugopal | 2015-03-24 |
| 8650002 | Determining plasma processing system readiness without generating plasma | Brian Choi, Vijayakumar C. Venugopal, Norman Williams | 2014-02-11 |
| 8340827 | Methods for controlling time scale of gas delivery into a processing chamber | Iqbal Shareef, Kurt M. Jorgensen, Robert Charatan | 2012-12-25 |
| 8295966 | Methods and apparatus to predict etch rate uniformity for qualification of a plasma chamber | Brian Choi, Vijayakumar C. Venugopal | 2012-10-23 |