Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662237 | MEMS coriolis gas flow controller | Dennis R. Smith, John Daugherty | 2023-05-30 |
| 11532460 | Gas mixer | Mark Taskar | 2022-12-20 |
| 10943769 | Gas distributor and flow verifier | Mark Taskar | 2021-03-09 |
| 10760944 | Hybrid flow metrology for improved chamber matching | Evangelos Spyropoulos, Piyush Agarwal, James Li-Guo LEUNG, Seyed Hossein Hashemi Ghermezi | 2020-09-01 |
| 10431431 | Gas supply delivery arrangement including a gas splitter for tunable gas flow control | Mark Taskar, Anthony Zemlock, Ryan Bise, Nathan Kugland | 2019-10-01 |
| 10128087 | Configuration independent gas delivery system | Mark Taskar | 2018-11-13 |
| 10022689 | Fluid mixing hub for semiconductor processing tool | Mark Taskar | 2018-07-17 |
| 10002747 | Methods and apparatus for supplying process gas in a plasma processing system | Evangelos Spyropoulos, Mark Taskar | 2018-06-19 |
| 9778083 | Metrology method for transient gas flow | Evangelos Spyropoulos | 2017-10-03 |
| 9721763 | Systems and methods for providing gases to a process chamber | Mark Taskar, Evangelos Spyropoulos | 2017-08-01 |
| 9721782 | Method and apparatus for shaping a gas profile near bevel edge | Jack Chen, Andrew D. Bailey, III | 2017-08-01 |
| 9704761 | Corrosion sensor retainer assembly apparatus and method for detecting corrosion | Mark Taskar, Anthony Zemlock | 2017-07-11 |
| 9580360 | Monolithic ceramic component of gas delivery system and method of making and use thereof | John Daugherty, Mike Ingamells | 2017-02-28 |
| 9364870 | Ultrasonic cleaning method and apparatus therefore | Evangelos Spyropoulos, Clifford Erik La Croix | 2016-06-14 |
| 9335768 | Cluster mass flow devices and multi-line mass flow devices incorporating the same | Mark Taskar | 2016-05-10 |
| 9174249 | Ultrasonic cleaning method and apparatus therefore | Evangelos Spyropoulos, Clifford Erik La Croix | 2015-11-03 |
| 9175808 | System and method for decreasing scrubber exhaust from gas delivery panels | Mark Taskar | 2015-11-03 |
| 9090972 | Gas supply systems for substrate processing chambers and methods therefor | Mark Taskar, Evangelos Spyropoulos | 2015-07-28 |
| 9091397 | Shared gas panels in plasma processing chambers employing multi-zone gas feeds | Piyush Agarwal, Evangelos Spyropoulos, Mark Taskar | 2015-07-28 |
| 9004086 | Methods and apparatus for displacing fluids from substrates using supercritical CO2 | Ronda K. Nixon, Mark I. Wagner, Robert M. McAndrew, Tony R. Kroeker | 2015-04-14 |
| 8851113 | Shared gas panels in plasma processing systems | Mark Taskar | 2014-10-07 |
| 8794267 | Gas transport delay resolution for short etch recipes | Mark Taskar, Tony Zemlock | 2014-08-05 |
| 8521461 | Apparatus for delivering a process gas | James V. Tietz, Vernon Wong, Richard J. Meinecke | 2013-08-27 |
| 8340827 | Methods for controlling time scale of gas delivery into a processing chamber | Gunsu Yun, Kurt M. Jorgensen, Robert Charatan | 2012-12-25 |
| 8150646 | Methods for delivering a process gas | James V. Tietz, Vernon Wong, Richard J. Meinecke | 2012-04-03 |