Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9004086 | Methods and apparatus for displacing fluids from substrates using supercritical CO2 | Ronda K. Nixon, Iqbal Shareef, Mark I. Wagner, Robert M. McAndrew | 2015-04-14 |
| 7682462 | Cluster tool process chamber having integrated high pressure and vacuum chambers | — | 2010-03-23 |
| 7445015 | Cluster tool process chamber having integrated high pressure and vacuum chambers | — | 2008-11-04 |
| 6719516 | Single wafer load lock with internal wafer transport | — | 2004-04-13 |
| 6601824 | Single shaft, dual cradle vacuum slot valve | Gregory A. Tomasch | 2003-08-05 |
| 6564818 | Methods of implementing a single shaft, dual cradle vacuum slot valve | Gregory A. Tomasch | 2003-05-20 |
| 6494670 | Three chamber load lock apparatus | — | 2002-12-17 |
| 6390448 | Single shaft dual cradle vacuum slot valve | Gregory A. Tomasch | 2002-05-21 |
| 6250869 | Three chamber load lock apparatus | — | 2001-06-26 |
| 6244811 | Atmospheric wafer transfer module with nest for wafer transport robot | Larry Cook | 2001-06-12 |
| 6222337 | Mechanically clamping robot wrist | Jeffrey C. Hudgens | 2001-04-24 |
| 6095741 | Dual sided slot valve and method for implementing the same | Benjamin W. Mooring, Nicolas Bright | 2000-08-01 |
| 6057662 | Single motor control for substrate handler in processing system | Robert M. McAndrew | 2000-05-02 |
| 6056504 | Adjustable frog-leg robot | Jeffrey C. Hudgens | 2000-05-02 |
| 6000227 | Wafer cooling in a transfer chamber of a vacuum processing system | — | 1999-12-14 |
| 5961269 | Three chamber load lock apparatus | — | 1999-10-05 |
| 5955858 | Mechanically clamping robot wrist | Jeffrey C. Hudgens | 1999-09-21 |
| 5789878 | Dual plane robot | Ben Mooring | 1998-08-04 |
| 5235740 | Press with pin detection for interference connectors | Elmer L. B. Kroeker, Robert N. Sage | 1993-08-17 |