Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620410 | Methods for preventing precipitation of etch byproducts during an etch process and/or subsequent rinse process | James DeYoung | 2017-04-11 |
| 9004086 | Methods and apparatus for displacing fluids from substrates using supercritical CO2 | Ronda K. Nixon, Iqbal Shareef, Robert M. McAndrew, Tony R. Kroeker | 2015-04-14 |
| 8961701 | Method and system of drying a microelectronic topography | James DeYoung | 2015-02-24 |
| 8623764 | Composition and methods for forming metal films on semiconductor substrates using supercritical solvents | — | 2014-01-07 |
| 8617301 | Compositions and methods for forming and depositing metal films on semiconductor substrates using supercritical solvents | — | 2013-12-31 |
| 8153533 | Methods and systems for preventing feature collapse during microelectronic topography fabrication | James DeYoung | 2012-04-10 |
| 7786011 | Composition and methods for forming metal films on semiconductor substrates using supercritical solvents | — | 2010-08-31 |
| 7648818 | Compositions and methods for image development of conventional chemically amplified photoresists | James DeYoung | 2010-01-19 |
| 7592035 | Method of coating microelectronic substrates | James DeYoung, James B. McClain, Stephen M. Gross, Doug Taylor, David Brainard | 2009-09-22 |
| 7410751 | Compositions and methods for image development of conventional chemically amplified photoresists | James DeYoung | 2008-08-12 |
| 7329483 | Low pH development solutions for chemically amplified photoresists | James DeYoung, Merrick Miles, Chris Harbinson | 2008-02-12 |
| 7235347 | Low pH development solutions for chemically amplified photoresists | Merrick Miles, Chris Harbinson | 2007-06-26 |
| 7141496 | Method of treating microelectronic substrates | James DeYoung, James B. McClain, Stephen M. Gross, Doug Taylor, David Brainard | 2006-11-28 |
| 6989172 | Method of coating microelectronic substrates | James DeYoung, James B. McClain, Stephen M. Gross, Doug Taylor, David Brainard | 2006-01-24 |
| 6953041 | Compositions of transition metal species in dense phase carbon dioxide and methods of use thereof | James DeYoung, James B. McClain, Stephen M. Gross | 2005-10-11 |
| 6905555 | Methods for transferring supercritical fluids in microelectronic and other industrial processes | James DeYoung, James B. McClain, Stephen M. Gross | 2005-06-14 |
| 6669785 | Methods and compositions for etch cleaning microelectronic substrates in carbon dioxide | James DeYoung, Stephen M. Gross, James B. McClain | 2003-12-30 |
| 6355735 | Semi-interpenetrating polymer network from epoxy monomer and olefin | Stephen Meyer | 2002-03-12 |