| 9620410 |
Methods for preventing precipitation of etch byproducts during an etch process and/or subsequent rinse process |
James DeYoung |
2017-04-11 |
| 9004086 |
Methods and apparatus for displacing fluids from substrates using supercritical CO2 |
Ronda K. Nixon, Iqbal Shareef, Robert M. McAndrew, Tony R. Kroeker |
2015-04-14 |
| 8961701 |
Method and system of drying a microelectronic topography |
James DeYoung |
2015-02-24 |
| 8623764 |
Composition and methods for forming metal films on semiconductor substrates using supercritical solvents |
— |
2014-01-07 |
| 8617301 |
Compositions and methods for forming and depositing metal films on semiconductor substrates using supercritical solvents |
— |
2013-12-31 |
| 8153533 |
Methods and systems for preventing feature collapse during microelectronic topography fabrication |
James DeYoung |
2012-04-10 |
| 7786011 |
Composition and methods for forming metal films on semiconductor substrates using supercritical solvents |
— |
2010-08-31 |
| 7648818 |
Compositions and methods for image development of conventional chemically amplified photoresists |
James DeYoung |
2010-01-19 |
| 7592035 |
Method of coating microelectronic substrates |
James DeYoung, James B. McClain, Stephen M. Gross, Doug Taylor, David Brainard |
2009-09-22 |
| 7410751 |
Compositions and methods for image development of conventional chemically amplified photoresists |
James DeYoung |
2008-08-12 |
| 7329483 |
Low pH development solutions for chemically amplified photoresists |
James DeYoung, Merrick Miles, Chris Harbinson |
2008-02-12 |
| 7235347 |
Low pH development solutions for chemically amplified photoresists |
Merrick Miles, Chris Harbinson |
2007-06-26 |
| 7141496 |
Method of treating microelectronic substrates |
James DeYoung, James B. McClain, Stephen M. Gross, Doug Taylor, David Brainard |
2006-11-28 |
| 6989172 |
Method of coating microelectronic substrates |
James DeYoung, James B. McClain, Stephen M. Gross, Doug Taylor, David Brainard |
2006-01-24 |
| 6953041 |
Compositions of transition metal species in dense phase carbon dioxide and methods of use thereof |
James DeYoung, James B. McClain, Stephen M. Gross |
2005-10-11 |
| 6905555 |
Methods for transferring supercritical fluids in microelectronic and other industrial processes |
James DeYoung, James B. McClain, Stephen M. Gross |
2005-06-14 |
| 6669785 |
Methods and compositions for etch cleaning microelectronic substrates in carbon dioxide |
James DeYoung, Stephen M. Gross, James B. McClain |
2003-12-30 |
| 6355735 |
Semi-interpenetrating polymer network from epoxy monomer and olefin |
Stephen Meyer |
2002-03-12 |
