| 7592035 |
Method of coating microelectronic substrates |
James DeYoung, James B. McClain, Stephen M. Gross, Doug Taylor, Mark I. Wagner |
2009-09-22 |
| 7141496 |
Method of treating microelectronic substrates |
James DeYoung, James B. McClain, Stephen M. Gross, Doug Taylor, Mark I. Wagner |
2006-11-28 |
| 6989172 |
Method of coating microelectronic substrates |
James DeYoung, James B. McClain, Stephen M. Gross, Doug Taylor, Mark I. Wagner |
2006-01-24 |
| 6982007 |
Divided pressure vessel apparatus for carbon dioxide based systems and methods of using same |
Steven L. Worm, James DeYoung, James B. McClain |
2006-01-03 |
| 6921420 |
Apparatus and methods for conserving vapor in a carbon dioxide dry cleaning system |
James B. McClain, Michael E. Cole, Steve Worm |
2005-07-26 |
| 6795991 |
Apparatus for conserving vapor in a carbon dioxide dry cleaning system |
James B. McClain, Michael E. Cole, Steve Worm |
2004-09-28 |
| 6782900 |
Methods and apparatus for cleaning and/or treating a substrate using CO2 |
James DeYoung, James B. McClain, Michael E. Cole, Steven L. Worm |
2004-08-31 |
| 6734112 |
Divided pressure vessel apparatus for carbon dioxide based systems and methods of using same |
Steven L. Worm, James DeYoung, James B. McClain |
2004-05-11 |
| 6666050 |
Apparatus for conserving vapor in a carbon dioxide dry cleaning system |
James B. McClain, Michael E. Cole, Steve Worm |
2003-12-23 |
| 6596093 |
Methods for cleaning microelectronic structures with cyclical phase modulation |
James DeYoung, James B. McClain, Michael E. Cole |
2003-07-22 |
| 6397421 |
Methods and apparatus for conserving vapor and collecting liquid carbon dioxide for carbon dioxide dry cleaning |
James B. McClain, Michael E. Cole, Steve Worm |
2002-06-04 |
| 6314601 |
System for the control of a carbon dioxide cleaning apparatus |
James B. McClain, Michael E. Cole, Steve Worm |
2001-11-13 |