Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581214 | Enhanced automatic wafer centering system and techniques for same | Peter Thaulad, Brett M. Herzig, Richard M. Blank | 2023-02-14 |
| 10796940 | Enhanced automatic wafer centering system and techniques for same | Peter Thaulad, Brett M. Herzig, Richard M. Blank | 2020-10-06 |
| 10790237 | Fiducial-filtering automatic wafer centering process and associated system | Damon Tyrone Genetti | 2020-09-29 |
| 10559483 | Platform architecture to improve system productivity | Richard H. Gould, Candi Kristoffersen, Gustavo G. Francken, James Van Gogh | 2020-02-11 |
| 10256124 | Method and system related to semiconductor processing equipment | — | 2019-04-09 |
| 9293317 | Method and system related to semiconductor processing equipment | — | 2016-03-22 |
| 9117860 | Controlled ambient system for interface engineering | John M. Boyd, Yezdi Dordi, Tiruchirapalli Arunagiri, John Parks, William Thie +7 more | 2015-08-25 |
| 8185242 | Dynamic alignment of wafers using compensation values obtained through a series of wafer movements | Scott Wong, Jeffrey Lin, Andrew D. Bailey, III, Jack Chen, Chung-Ho Huang | 2012-05-22 |
| 7164282 | Methods and apparatus for determining an average electrical response to a conductive layer on a substrate | Andrew D. Bailey, III, Michael S. Leonard, Candi Kristoffersen | 2007-01-16 |
| 6629053 | Method and apparatus for determining substrate offset using optimization techniques | — | 2003-09-30 |
| 6502054 | Method of and apparatus for dynamic alignment of substrates | Charles Freund | 2002-12-31 |
| 6267545 | Semiconductor processing platform architecture having processing module isolation capabilities | Nicolas Bright | 2001-07-31 |
| 6095741 | Dual sided slot valve and method for implementing the same | Tony R. Kroeker, Nicolas Bright | 2000-08-01 |