Issued Patents All Time
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9287110 | Method and apparatus for wafer electroless plating | William Thie, John M. Boyd, Fritz Redeker, Yezdi Dordi, Tiruchirapalli Arunagiri +5 more | 2016-03-15 |
| 9117860 | Controlled ambient system for interface engineering | John M. Boyd, Yezdi Dordi, Tiruchirapalli Arunagiri, Benjamin W. Mooring, William Thie +7 more | 2015-08-25 |
| 8844461 | Fluid handling system for wafer electroless plating and associated methods | William Thie, John M. Boyd, Fritz Redeker, Yezdi Dordi, Tiruchirapalli Arunagiri +5 more | 2014-09-30 |
| 8591665 | Wafer heating and temperature control by backside fluid injection | Ben Mooring, Diane Hymes | 2013-11-26 |
| 8555903 | Method and apparatus for removing contamination from substrate | Erik M. Freer, John M. de Larios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik +2 more | 2013-10-15 |
| 8522799 | Apparatus and system for cleaning a substrate | Erik M. Freer, John M. de Larios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik +2 more | 2013-09-03 |
| 8485120 | Method and apparatus for wafer electroless plating | William Thie, John M. Boyd, Fritz Redeker, Yezdi Dordi, Tiruchirapalli Arunagiri +5 more | 2013-07-16 |
| 8328942 | Wafer heating and temperature control by backside fluid injection | Ben Mooring, Diane Hymes | 2012-12-11 |
| 8314027 | Wafer electroless plating system and associated methods | William Thie, John M. Boyd, Fritz Redeker, Yezdi Dordi, Tiruchirapalli Arunagiri +5 more | 2012-11-20 |
| 8069813 | Wafer electroless plating system and associated methods | William Thie, John M. Boyd, Fritz Redeker, Yezdi Dordi, Tiruchirapalli Arunagiri +5 more | 2011-12-06 |
| 7896974 | Chamber for wafer cleaning and method for making the same | — | 2011-03-01 |
| 7758404 | Apparatus for cleaning edge of substrate and method for using the same | Jason A. Ryder, Ji Zhu, Mark Wilcoxson, Fritz Redeker, Charles N. Ditmore +1 more | 2010-07-20 |
| 7648584 | Method and apparatus for removing contamination from substrate | Erik M. Freer, John M. de Larios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik +2 more | 2010-01-19 |
| 7604011 | Method and apparatus for semiconductor wafer cleaning using high-frequency acoustic energy with supercritical fluid | Fred C. Redeker, John M. Boyd | 2009-10-20 |
| 7591613 | Method and apparatus for transporting a substrate using non-newtonian fluid | John M. de Larios, Mike Ravkin, Mikhail Korolik, Fred C. Redeker | 2009-09-22 |
| 7566370 | Wafer clamping apparatus and method for operating the same | — | 2009-07-28 |
| 7416370 | Method and apparatus for transporting a substrate using non-Newtonian fluid | John M. de Larios, Mike Ravkin, Mikhail Korolik, Fred C. Redeker | 2008-08-26 |
| 7406972 | Substrate proximity processing structures | Carl Woods, Michael G. R. Smith | 2008-08-05 |
| 7392815 | Chamber for wafer cleaning and method for making the same | — | 2008-07-01 |
| 7389783 | Proximity meniscus manifold | Carl Woods, Michael G. R. Smith, James P. Garcia, John M. de Larios | 2008-06-24 |
| 7357115 | Wafer clamping apparatus and method for operating the same | — | 2008-04-15 |
| 7350315 | Edge wheel dry manifold | Glenn W. Davis, Carl Woods, Fred C. Redeker, Mike Ravkin, Michael L. Orbock | 2008-04-01 |
| 7293571 | Substrate proximity processing housing and insert for generating a fluid meniscus | Carl Woods, Michael G. R. Smith | 2007-11-13 |
| 7254900 | Wafer edge wheel with drying function | — | 2007-08-14 |
| 7191787 | Method and apparatus for semiconductor wafer cleaning using high-frequency acoustic energy with supercritical fluid | Fred C. Redeker, John M. Boyd | 2007-03-20 |