Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9117860 | Controlled ambient system for interface engineering | John M. Boyd, Yezdi Dordi, Tiruchirapalli Arunagiri, Benjamin W. Mooring, John Parks +7 more | 2015-08-25 |
| 8726919 | Method and system for uniformly applying a multi-phase cleaning solution to a substrate | Jeffrey Farber, Ji Zhu, John M. de Larios | 2014-05-20 |
| 8567421 | Method and system for uniformly applying a multi-phase cleaning solution to a substrate | Jeffrey Farber, Ji Zhu, John M. de Larios | 2013-10-29 |
| 8236382 | Proximity substrate preparation sequence, and method, apparatus, and system for implementing the same | Michael Ravkin, John M. de Larios, Mikhail Korolik, Michael G. R. Smith | 2012-08-07 |
| 8221608 | Proximity processing using controlled batch volume with an integrated proximity head | Yezdi Dordi, Jacob Wylie, Robert A. Maraschin | 2012-07-17 |
| 8048283 | Method and apparatus for plating semiconductor wafers | Yezdi Dordi, Bob Maraschin, John M. Boyd, Fred C. Redeker | 2011-11-01 |
| 7913703 | Method and apparatus for uniformly applying a multi-phase cleaning solution to a substrate | Jeffrey Farber, Ji Zhu, John M. de Larios | 2011-03-29 |
| 7862693 | Apparatus for plating semiconductor wafers | Yezdi Dordi, Fred C. Redeker, John M. Boyd, Robert A. Maraschin | 2011-01-04 |
| 7828951 | Wafer support apparatus for electroplating process and method for using the same | — | 2010-11-09 |
| 7811423 | Proximity processing using controlled batch volume with an integrated proximity head | Yezdi Dordi, Jacob Wylie, Robert A. Maraschin | 2010-10-12 |
| 7811424 | Reducing mechanical resonance and improved distribution of fluids in small volume processing of semiconductor materials | Jeffrey Farber | 2010-10-12 |
| 7780825 | Substrate gripper with integrated electrical contacts | Aleksander Owczarz, Robert Knop, Mike Ravkin | 2010-08-24 |
| 7731802 | Methods for transitioning a fluid meniscus to and from surfaces of a substrate | — | 2010-06-08 |
| 7722724 | Methods for substrate processing in cluster tool configurations having meniscus application systems | John M. de Larios | 2010-05-25 |
| 7704367 | Method and apparatus for plating semiconductor wafers | Yezdi Dordi, Bob Maraschin, John M. Boyd, Fred C. Redeker | 2010-04-27 |
| 7645364 | Apparatus and method for plating semiconductor wafers | Yezdi Dordi, Fred C. Redeker, John M. Boyd, Robert A. Maraschin | 2010-01-12 |
| 7566390 | Wafer support apparatus for electroplating process and method for using the same | — | 2009-07-28 |
| 7513262 | Substrate meniscus interface and methods for operation | — | 2009-04-07 |
| 7464719 | Multi-menisci processing apparatus | James P. Garcia, Mike Ravkin, Fred C. Redeker, John M. de Larios | 2008-12-16 |
| 7452408 | System and method for producing bubble free liquids for nanometer scale semiconductor processing | Jeffrey Farber | 2008-11-18 |
| 7406972 | Substrate proximity processing structures | Michael G. R. Smith, John Parks | 2008-08-05 |
| 7395611 | System processing a substrate using dynamic liquid meniscus | James P. Garcia, John M. de Larios, Michael Ravkin, Fred C. Redeker | 2008-07-08 |
| 7389783 | Proximity meniscus manifold | Michael G. R. Smith, John Parks, James P. Garcia, John M. de Larios | 2008-06-24 |
| 7387689 | Methods for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces | John M. de Larios, Mike Ravkin, Fritz Redeker, James P. Garcia | 2008-06-17 |
| 7383844 | Meniscus, vacuum, IPA vapor, drying manifold | James P. Garcia, John M. de Larios | 2008-06-10 |