Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7350315 | Edge wheel dry manifold | Glenn W. Davis, John Parks, Fred C. Redeker, Mike Ravkin, Michael L. Orbock | 2008-04-01 |
| 7350316 | Meniscus proximity system for cleaning semiconductor substrate surfaces | James P. Garcia, John M. de Larios | 2008-04-01 |
| 7293571 | Substrate proximity processing housing and insert for generating a fluid meniscus | Michael G. R. Smith, John Parks | 2007-11-13 |
| 7240679 | System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold | John M. de Larios | 2007-07-10 |
| 7234477 | Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces | John M. de Larios, Mike Ravkin, Fritz Redeker, James P. Garcia, Afshin Nickhou | 2007-06-26 |
| 7198055 | Meniscus, vacuum, IPA vapor, drying manifold | James P. Garcia, John M. de Larios | 2007-04-03 |
| 7192488 | Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus | James P. Garcia, John M. de Larios | 2007-03-20 |
| 7127831 | Methods and systems for processing a substrate using a dynamic liquid meniscus | James P. Garcia, John M. de Larios, Michael Ravkin, Fred C. Redeker | 2006-10-31 |
| 7128279 | Method and apparatus for fluid delivery to a backside of a substrate | John M. Boyd | 2006-10-31 |
| 7069937 | Vertical proximity processor | James P. Garcia, Mike Ravkin, Fred C. Redeker, John M. de Larios | 2006-07-04 |
| 7000622 | Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus | James P. Garcia, John M. de Larios | 2006-02-21 |
| 6988327 | Methods and systems for processing a substrate using a dynamic liquid meniscus | James P. Garcia, John M. de Larios, Michael Ravkin, Fred C. Redeker | 2006-01-24 |
| 6857435 | Method and apparatus for cooling a resonator of a megasonic transducer | John M. Boyd, John deLarios | 2005-02-22 |
| 6729339 | Method and apparatus for cooling a resonator of a megasonic transducer | John M. Boyd, John deLarios | 2004-05-04 |
| 6702202 | Method and apparatus for fluid delivery to a backside of a substrate | John M. Boyd | 2004-03-09 |