Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7780825 | Substrate gripper with integrated electrical contacts | Aleksander Owczarz, Mike Ravkin, Carl Woods | 2010-08-24 |
| 7053000 | System, method and apparatus for constant voltage control of RF generator for optimum operation | Thomas W. Anderson | 2006-05-30 |
| 7033845 | Phase control of megasonic RF generator for optimum operation | Thomas W. Anderson | 2006-04-25 |
| 6508913 | Gas distribution apparatus for semiconductor processing | Brian McMillin | 2003-01-21 |
| 6361645 | Method and device for compensating wafer bias in a plasma processing chamber | Alan M. Schoepp, Christopher H. Olson, Michael Barnes, Tuan Ngo | 2002-03-26 |
| 6333272 | Gas distribution apparatus for semiconductor processing | Brian McMillin | 2001-12-25 |