Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997381 | Hybrid edge ring for plasma wafer processing | Arthur H. Sato, Neil Benjamin | 2018-06-12 |
| 9387521 | Method of wet cleaning aluminum chamber parts | Hong Shih, Fan-Cheung Sze, John Daugherty, Yan Fang, Duane Outka +2 more | 2016-07-12 |
| 9267605 | Pressure control valve assembly of plasma processing chamber and rapid alternating process | Mirzafer Abatchev, Camelia Rusu | 2016-02-23 |
| 8628675 | Method for reduction of voltage potential spike during dechucking | Jose Tong, Yen-Kun Wang | 2014-01-14 |
| 8440473 | Use of spectrum to synchronize RF switching with gas switching during etch | Qing Xu, Camelia Rusu, Alexander Paterson | 2013-05-14 |
| 8313612 | Method and apparatus for reduction of voltage potential spike during dechucking | Jose Tong, Yen-Kun Wang | 2012-11-20 |
| 8070328 | LED downlight | David W. Knoble, Khosrow Jamasbi | 2011-12-06 |
| 8055489 | Method for using an RC circuit to model trapped charge in an electrostatic chuck | Konstantin Makhratchev | 2011-11-08 |
| 7653394 | Node-to node messaging transceiver network with dynamic routing and configuring | — | 2010-01-26 |
| 7481292 | Vehicle ignition interlock systems with retesting frequency control | Larry J. Mobley, Jimmy H. Edwards, James R. Lewis | 2009-01-27 |
| 7377352 | Vehicle ignition interlock systems with mouth alcohol contamination sensor | Larry J. Mobley, Jimmy H. Edwards, James R. Lewis | 2008-05-27 |
| 7299890 | Vehicle ignition interlock systems having transdermal alcohol sensor | Larry J. Mobley, James R. Lewis | 2007-11-27 |
| 7287617 | Vehicle ignition interlock systems with multiple alcohol sensors | Larry J. Mobley, Jimmy H. Edwards, James R. Lewis | 2007-10-30 |
| 7218236 | Vehicle ignition interlock systems that detect the presence of alcohol within vehicles | Larry J. Mobley, James R. Lewis | 2007-05-15 |
| D540208 | Sample head for breath analyzer ignition interlock device | Larry J. Mobley, William Rathbun, Michael A. Purdy, James R. Lewis | 2007-04-10 |
| D540209 | Control module for breath analyzer ignition interlock device | Larry J. Mobley, William Rathbun, Michael A. Purdy, James R. Lewis | 2007-04-10 |
| 7156951 | Multiple zone gas distribution apparatus for thermal control of semiconductor wafer | Qinghong K. Gao, Bill Denty | 2007-01-02 |
| 7052553 | Wet cleaning of electrostatic chucks | Hong Shih, Tuochuan Huang, Catherine Zhou, Bruno Morel, Paul Mulgrew +1 more | 2006-05-30 |
| 7053994 | Method and apparatus for etch endpoint detection | Francois C. Dassapa | 2006-05-30 |
| 7027773 | On/off keying node-to-node messaging transceiver network with dynamic routing and configuring | — | 2006-04-11 |
| 6908846 | Method and apparatus for detecting endpoint during plasma etching of thin films | Eric A. Hudson, Jeffrey Marks | 2005-06-21 |
| 6709547 | Moveable barrier for multiple etch processes | Tuqiang Ni, Kenji Takeshita | 2004-03-23 |
| 6692649 | Inductively coupled plasma downstream strip module | Wenli Collison, Michael Barnes, Tuqiang Ni, Butch Berney, Wayne Vereb | 2004-02-17 |
| 6646385 | Plasma excitation coil | Arthur M. Howald, Frank Y. Lin | 2003-11-11 |
| 6626185 | Method of depositing a silicon containing layer on a semiconductor substrate | Alex Demos, Paul Shufflebotham, Michael Barnes, Huong Nguyen, Monique Ben-Dor | 2003-09-30 |