Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262843 | Cooling water jet pack for high power rotary cathodes | Robert Martinson, Kevin Lynch, Heinrich von Bunau, Deborah Sloan, Daniel R. Juliano | 2019-04-16 |
| 9512516 | Cooling water jet pack for high power rotary cathodes | Robert Martinson, Kevin Lynch, Heinrich von Bunau, Deborah Sloan, Daniel R. Juliano | 2016-12-06 |
| 9303316 | Continuous web apparatus and method using an air to vacuum seal and accumulator | Robert Martinson, Heinrich von Bunau, Kevin Lynch, Mathew Sheffield | 2016-04-05 |
| 9169548 | Photovoltaic cell with copper poor CIGS absorber layer and method of making thereof | John Corson, Alex Austin, Ron Rulkens, Jochen Titus, Robert Tas +2 more | 2015-10-27 |
| 8956888 | Photovoltaic device and method and system for making photovoltaic device | — | 2015-02-17 |
| 8710350 | Combination photovoltaic and wind power generation installation | — | 2014-04-29 |
| 8664560 | Method and apparatus for abatement of reaction products from a vacuum processing chamber | Michael Barnes | 2014-03-04 |
| 8656658 | Retainers for attaching photovoltaic modules to mounting structures | Todd Krajewski | 2014-02-25 |
| 8048707 | Sulfur salt containing CIG targets, methods of making and methods of use thereof | Daniel R. Juliano, Robert Tas, Neil Mackie | 2011-11-01 |
| 6888040 | Method and apparatus for abatement of reaction products from a vacuum processing chamber | Michael Barnes | 2005-05-03 |
| 6626185 | Method of depositing a silicon containing layer on a semiconductor substrate | Alex Demos, Michael Barnes, Huong Nguyen, Brian McMillin, Monique Ben-Dor | 2003-09-30 |
| 6468384 | Predictive wafer temperature control system and method | Vikram Singh, Robert J. Whiting, Ajay Saproo | 2002-10-22 |
| 6184158 | Inductively coupled plasma CVD | Brian McMillin, Alex Demos, Huong Nguyen, Butch Berney, Monique Ben-Dor | 2001-02-06 |
| 6106678 | Method of high density plasma CVD gap-filling | Mark K. Weise | 2000-08-22 |
| 6086246 | Two-element plasma resistant lightpipe assembly | Heinrich von Bunau | 2000-07-11 |
| 5847918 | Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors | Michael Barnes | 1998-12-08 |
| 5838529 | Low voltage electrostatic clamp for substrates such as dielectric substrates | Michael Barnes | 1998-11-17 |
| 5805408 | Electrostatic clamp with lip seal for clamping substrates | Robert A. Maraschin, Michael Barnes | 1998-09-08 |
| 5711998 | Method of polycrystalline silicon hydrogenation | — | 1998-01-27 |
| 5669977 | Shape memory alloy lift pins for semiconductor processing equipment | Christopher E. Griffin | 1997-09-23 |
| 5503676 | Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber | Larry D. Hartsough, Dean R. Denison | 1996-04-02 |