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Cooling water jet pack for high power rotary cathodes |
Robert Martinson, Kevin Lynch, Heinrich von Bunau, Deborah Sloan, Daniel R. Juliano |
2019-04-16 |
| 9512516 |
Cooling water jet pack for high power rotary cathodes |
Robert Martinson, Kevin Lynch, Heinrich von Bunau, Deborah Sloan, Daniel R. Juliano |
2016-12-06 |
| 9303316 |
Continuous web apparatus and method using an air to vacuum seal and accumulator |
Robert Martinson, Heinrich von Bunau, Kevin Lynch, Mathew Sheffield |
2016-04-05 |
| 9169548 |
Photovoltaic cell with copper poor CIGS absorber layer and method of making thereof |
John Corson, Alex Austin, Ron Rulkens, Jochen Titus, Robert Tas +2 more |
2015-10-27 |
| 8956888 |
Photovoltaic device and method and system for making photovoltaic device |
— |
2015-02-17 |
| 8710350 |
Combination photovoltaic and wind power generation installation |
— |
2014-04-29 |
| 8664560 |
Method and apparatus for abatement of reaction products from a vacuum processing chamber |
Michael Barnes |
2014-03-04 |
| 8656658 |
Retainers for attaching photovoltaic modules to mounting structures |
Todd Krajewski |
2014-02-25 |
| 8048707 |
Sulfur salt containing CIG targets, methods of making and methods of use thereof |
Daniel R. Juliano, Robert Tas, Neil Mackie |
2011-11-01 |
| 6888040 |
Method and apparatus for abatement of reaction products from a vacuum processing chamber |
Michael Barnes |
2005-05-03 |
| 6626185 |
Method of depositing a silicon containing layer on a semiconductor substrate |
Alex Demos, Michael Barnes, Huong Nguyen, Brian McMillin, Monique Ben-Dor |
2003-09-30 |
| 6468384 |
Predictive wafer temperature control system and method |
Vikram Singh, Robert J. Whiting, Ajay Saproo |
2002-10-22 |
| 6184158 |
Inductively coupled plasma CVD |
Brian McMillin, Alex Demos, Huong Nguyen, Butch Berney, Monique Ben-Dor |
2001-02-06 |
| 6106678 |
Method of high density plasma CVD gap-filling |
Mark K. Weise |
2000-08-22 |
| 6086246 |
Two-element plasma resistant lightpipe assembly |
Heinrich von Bunau |
2000-07-11 |
| 5847918 |
Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors |
Michael Barnes |
1998-12-08 |
| 5838529 |
Low voltage electrostatic clamp for substrates such as dielectric substrates |
Michael Barnes |
1998-11-17 |
| 5805408 |
Electrostatic clamp with lip seal for clamping substrates |
Robert A. Maraschin, Michael Barnes |
1998-09-08 |
| 5711998 |
Method of polycrystalline silicon hydrogenation |
— |
1998-01-27 |
| 5669977 |
Shape memory alloy lift pins for semiconductor processing equipment |
Christopher E. Griffin |
1997-09-23 |
| 5503676 |
Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber |
Larry D. Hartsough, Dean R. Denison |
1996-04-02 |
