Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11273469 | Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy | Brian J. Coppa, Deepak Vedhachalam | 2022-03-15 |
| 10773282 | Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy | Brian J. Coppa, Deepak Vedhachalam | 2020-09-15 |
| 7053994 | Method and apparatus for etch endpoint detection | Brian McMillin | 2006-05-30 |