Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11273469 | Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy | Brian J. Coppa, Francois C. Dassapa | 2022-03-15 |
| 10773282 | Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy | Brian J. Coppa, Francois C. Dassapa | 2020-09-15 |
| 10436717 | Compositional optical emission spectroscopy for detection of particle induced arcs in a fabrication process | Thomas R. Omstead, Ke-Hung Chen | 2019-10-08 |