Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9387521 | Method of wet cleaning aluminum chamber parts | Hong Shih, Fan-Cheung Sze, Brian McMillin, John Daugherty, Duane Outka +2 more | 2016-07-12 |
| 9241406 | Electronic assembly | Po-Fu Huang, Chun-Ming Lin | 2016-01-19 |
| 9105676 | Method of removing damaged epoxy from electrostatic chuck | Hong Shih, Tuochuan Huang, Cliff LaCroix, Neal Newton, Rish Chhatre | 2015-08-11 |
| 9082805 | System and method for testing an electrostatic chuck | Hong Shih, Saurabh Ullal, Tuochuan Huang, Jon McChesney | 2015-07-14 |
| 8545639 | Method of cleaning aluminum plasma chamber parts | Hong Shih, John Daugherty, Dean J. Larson, Tuochuan Huang, Armen Avoyan +5 more | 2013-10-01 |
| 8276604 | Peripherally engaging electrode carriers and assemblies incorporating the same | Jason Augustino, Armen Avoyan, Duane Outka, Hong Shih, Stephen Whitten | 2012-10-02 |
| 8221552 | Cleaning of bonded silicon electrodes | Duane Outka, Jason Augustino, Armen Avoyan, Stephen Whitten, Hong Shih | 2012-07-17 |
| 8171877 | Backside mounted electrode carriers and assemblies incorporating the same | Jason Augustino, Armen Avoyan, Duane Outka, Hong Shih, Stephen Whitten | 2012-05-08 |
| 8143904 | System and method for testing an electrostatic chuck | Hong Shih, Saurabh Ullal, Tuochuan Huang, Jon McChesney | 2012-03-27 |
| 8075701 | Processes for reconditioning multi-component electrodes | Armen Avoyan, Duane Outka, Hong Shih, Stephen Whitten | 2011-12-13 |