Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10812033 | High-power radio-frequency spiral-coil filter | Sean O'Brien, Seyed Jafar Jafarian-Tehrani, Hema Swaroop Mopidevi, Neil Benjamin | 2020-10-20 |
| 10153136 | Hollow RF feed with coaxial DC power feed | John Drewery, Alex Paterson, Neil Benjamin | 2018-12-11 |
| 9484243 | Processing chamber with features from side wall | Dean J. Larson, Andreas Fischer, Andre DESEPTE, Harmeet Singh | 2016-11-01 |
| 9412555 | Lower electrode assembly of plasma processing chamber | Quan Chau, Keith Gaff, Hanh Tuong Ha, Brett C. Richardson, Harmeet Singh | 2016-08-09 |
| 9093483 | Showerhead electrode assembly with gas flow modification for extended electrode life | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa, Yen-Kun Wang +4 more | 2015-07-28 |
| 8709202 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa, Yen-Kun Wang +4 more | 2014-04-29 |
| 8702866 | Showerhead electrode assembly with gas flow modification for extended electrode life | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa, Yen-Kun Wang +4 more | 2014-04-22 |
| 8603292 | Quartz window for a degas chamber | Tim Hart | 2013-12-10 |
| 8492736 | Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates | Yen-Kun Wang, Shang-I Chou | 2013-07-23 |
| 8276604 | Peripherally engaging electrode carriers and assemblies incorporating the same | Armen Avoyan, Yan Fang, Duane Outka, Hong Shih, Stephen Whitten | 2012-10-02 |
| 8221552 | Cleaning of bonded silicon electrodes | Duane Outka, Armen Avoyan, Stephen Whitten, Hong Shih, Yan Fang | 2012-07-17 |
| 8215321 | Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses | Hong Shih, Yaobo Yin, Catherine Zhou, Armen Avoyan | 2012-07-10 |
| 8171877 | Backside mounted electrode carriers and assemblies incorporating the same | Armen Avoyan, Yan Fang, Duane Outka, Hong Shih, Stephen Whitten | 2012-05-08 |
| 7942973 | Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses | Hong Shih, Yaobo Yin, Catherine Zhou, Armen Avoyan | 2011-05-17 |
| 7854820 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa, Yen-Kun Wang +4 more | 2010-12-21 |
| 7767028 | Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses | Charles Rising | 2010-08-03 |