Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217944 | High power cable for heated components in RF environment | Kenneth Walter Finnegan, Sean O'Brien, Benson Q. Tong | 2025-02-04 |
| 11837446 | High power cable for heated components in RF environment | Kenneth Walter Finnegan, Sean O'Brien, Benson Q. Tong | 2023-12-05 |
| 10812033 | High-power radio-frequency spiral-coil filter | Sean O'Brien, Hema Swaroop Mopidevi, Neil Benjamin, Jason Augustino | 2020-10-20 |
| 10690727 | Identifying components associated with a fault in a plasma system | — | 2020-06-23 |
| 10381201 | Control of etch rate using modeling, feedback and impedance match | Bradford J. Lyndaker, John C. Valcore, Jr., Zhigang Chen, Alexei Marakhtanov | 2019-08-13 |
| 9851389 | Identifying components associated with a fault in a plasma system | — | 2017-12-26 |
| 9720022 | Systems and methods for providing characteristics of an impedance matching model for use with matching networks | Arthur M. Howald, Bradford J. Lyndaker, John C. Valcore, Jr. | 2017-08-01 |
| 9620334 | Control of etch rate using modeling, feedback and impedance match | Bradford J. Lyndaker, John C. Valcore, Jr., Alexei Marakhtanov, Zhigang Chen | 2017-04-11 |
| 9312832 | High power filter with single adjust for multiple channels | — | 2016-04-12 |
| 9305750 | Adjusting current ratios in inductively coupled plasma processing systems | Maolin Long | 2016-04-05 |
| 9074285 | Systems for detecting unconfined-plasma events | John Pease | 2015-07-07 |
| 8894804 | Plasma unconfinement sensor and methods thereof | Jean-Paul Booth, Alexei Marakhtanov, Rajinder Dhindsa, Luc Albarede | 2014-11-25 |
| 8742666 | Radio frequency (RF) power filters and plasma processing systems including RF power filters | Maolin Long, Ralph Jan-Pin Lu, Fred Dennis Egley, Thomas W. Anderson, Michael Giarratano | 2014-06-03 |
| 8736175 | Current control in plasma processing systems | Maolin Long, Arthur H. Sato, Neil Benjamin, Norman Williams | 2014-05-27 |
| 8466697 | Arrangements for detecting discontinuity of flexible connections for current flow and methods thereof | — | 2013-06-18 |
| 8315029 | ESC high voltage control and methods thereof | Ralph Jan-Pin Lu | 2012-11-20 |
| 7983018 | Plasma processing system ESC high voltage control and methods thereof | Ralph Jan-Pin Lu | 2011-07-19 |
| 7768766 | Plasma processing system ESC high voltage control | Ralph Jan-Pin Lu | 2010-08-03 |
| 7435926 | Methods and array for creating a mathematical model of a plasma processing system | — | 2008-10-14 |
| 6919689 | Method for toolmatching and troubleshooting a plasma processing system | Armen Avoyan | 2005-07-19 |
| 6873114 | Method for toolmatching and troubleshooting a plasma processing system | Armen Avoyan | 2005-03-29 |
| 6563076 | Voltage control sensor and control interface for radio frequency power regulation in a plasma reactor | Neil Benjamin, Scott Baldwin | 2003-05-13 |
| 6509542 | Voltage control sensor and control interface for radio frequency power regulation in a plasma reactor | Neil Benjamin, Scott Baldwin | 2003-01-21 |
| 5824606 | Methods and apparatuses for controlling phase difference in plasma processing systems | Robert D. Dible, Stephen G. Bradley | 1998-10-20 |
| 5812361 | Dynamic feedback electrostatic wafer chuck | Phillip Jones, Boris Atlas, David R. Liu, Ken Tokunaga, Ching-Hwa Chen | 1998-09-22 |