Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6039836 | Focus rings | Rajinder Dhindsa, Vikram Singh | 2000-03-21 |
| 5904779 | Wafer electrical discharge control by wafer lifter system | Rajinder Dhindsa, Steven Franchuk, Carlos Manzanilla | 1999-05-18 |
| 5812361 | Dynamic feedback electrostatic wafer chuck | Phillip Jones, Seyed Jafar Jafarian-Tehrani, Boris Atlas, David R. Liu, Ching-Hwa Chen | 1998-09-22 |