Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6411490 | Integrated power modules for plasma processing systems | — | 2002-06-25 |
| 6239403 | Power segmented electrode | Eric H. Lenz, Albert M. Lambson | 2001-05-29 |
| 6222718 | Integrated power modules for plasma processing systems | — | 2001-04-24 |
| 6042686 | Power segmented electrode | Eric H. Lenz, Albert M. Lambson | 2000-03-28 |
| 5824606 | Methods and apparatuses for controlling phase difference in plasma processing systems | Stephen G. Bradley, Seyed Jafar Jafarian-Tehrani | 1998-10-20 |
| 5573595 | Methods and apparatus for generating plasma | — | 1996-11-12 |
| 5534751 | Plasma etching apparatus utilizing plasma confinement | Eric H. Lenz | 1996-07-09 |