Issued Patents All Time
Showing 1–25 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12401338 | Multiple-output radiofrequency matching module and associated methods | Karl Leeser, Sunil Kapoor | 2025-08-26 |
| 12381065 | Methods and apparatus for controlling plasma in a plasma processing system | John C. Valcore, Jr. | 2025-08-05 |
| 12183544 | Tuning voltage setpoint in a pulsed RF signal for a tunable edge sheath system | David Hopkins, Alexei Marakhtanov, Felix Kozakevich | 2024-12-31 |
| 12040770 | Multiple-output radiofrequency matching module and associated methods | Karl Leeser, Sunil Kapoor | 2024-07-16 |
| 11798784 | Methods and apparatus for controlling plasma in a plasma processing system | John C. Valcore, Jr. | 2023-10-24 |
| 11361942 | Adjustment of power and frequency based on three or more states | John C. Valcore, Jr. | 2022-06-14 |
| 11038483 | Multiple-output radiofrequency matching module and associated methods | Karl Leeser, Sunil Kapoor | 2021-06-15 |
| 10861708 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Ranadeep Bhowmick, Eric A. Hudson, Felix Kozakevich +2 more | 2020-12-08 |
| 10707056 | Using modeling to determine ion energy associated with a plasma system | John C. Valcore, Jr. | 2020-07-07 |
| 10666218 | Multiple-output radiofrequency matching module and associated methods | Karl Leeser, Sunil Kapoor | 2020-05-26 |
| 10629413 | Adjustment of power and frequency based on three or more states | John C. Valcore, Jr. | 2020-04-21 |
| 10504744 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Ranadeep Bhowmick, Eric A. Hudson, Felix Kozakevich +2 more | 2019-12-10 |
| 10381201 | Control of etch rate using modeling, feedback and impedance match | John C. Valcore, Jr., Seyed Jafar Jafarian-Tehrani, Zhigang Chen, Alexei Marakhtanov | 2019-08-13 |
| 10340127 | Using modeling to determine wafer bias associated with a plasma system | John C. Valcore, Jr. | 2019-07-02 |
| 10319570 | Determining a malfunctioning device in a plasma system | John C. Valcore, Jr., Arthur H. Sato | 2019-06-11 |
| 10256078 | Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generator | Arthur M. Howald, John C. Valcore, Jr. | 2019-04-09 |
| 10256077 | Sub-pulsing during a state | John C. Valcore, Jr., Harmeet Singh | 2019-04-09 |
| 10231321 | State-based adjustment of power and frequency | John C. Valcore, Jr. | 2019-03-12 |
| 10074520 | Adjustment of power and frequency based on three or more states | John C. Valcore, Jr. | 2018-09-11 |
| 10032605 | Methods and apparatus for controlling plasma in a plasma processing system | John C. Valcore, Jr. | 2018-07-24 |
| 10020168 | Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generator | Arthur M. Howald, John C. Valcore, Jr. | 2018-07-10 |
| 10008371 | Determining a value of a variable on an RF transmission model | John C. Valcore, Jr. | 2018-06-26 |
| 9997333 | Sub-pulsing during a state | John C. Valcore, Jr., Harmeet Singh | 2018-06-12 |
| 9960015 | Impedance-based adjustment of power and frequency | John C. Valcore, Jr. | 2018-05-01 |
| 9954508 | Multiple-output radiofrequency matching module and associated methods | Karl Leeser, Sunil Kapoor | 2018-04-24 |