Issued Patents All Time
Showing 25 most recent of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12401338 | Multiple-output radiofrequency matching module and associated methods | Karl Leeser, Bradford J. Lyndaker | 2025-08-26 |
| 12394598 | Capacitance measurement without disconnecting from high power circuit | Thomas Frederick | 2025-08-19 |
| 12322582 | Anomalous plasma event detection and mitigation in semiconductor processing | Karl Leeser, Noah Elliot Baker, Liang Meng, Yukinori Sakiyama | 2025-06-03 |
| 12205796 | Radio frequency power generator having multiple output ports | — | 2025-01-21 |
| 12176189 | Early warning systems and methods for determining capacitor failures | James L. Allen | 2024-12-24 |
| 12143087 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | George Thomas, Yaswanth Rangineni, Edward Augustyniak | 2024-11-12 |
| 12051630 | RF current measurement in semiconductor processing tool | Thomas Frederick | 2024-07-30 |
| 12052006 | Mutually induced filters | Aaron W. Logan, Hyungjoon Kim, Yaswanth Rangineni, Karl Leeser | 2024-07-30 |
| 12040770 | Multiple-output radiofrequency matching module and associated methods | Karl Leeser, Bradford J. Lyndaker | 2024-07-16 |
| 11994542 | RF signal parameter measurement in an integrated circuit fabrication chamber | David French | 2024-05-28 |
| 11881381 | Capacitance measurement without disconnecting from high power circuit | Thomas Frederick | 2024-01-23 |
| 11823928 | Control of wafer bow in multiple stations | Edward Augustyniak, David French, Yukinori Sakiyama, George Thomas | 2023-11-21 |
| 11784027 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Karl Leeser, Vince Burkhart | 2023-10-10 |
| 11594397 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Eller Y. Juco, Karl Leeser, David French, Aaron Bingham, David Alan Metz +3 more | 2023-02-28 |
| 11264207 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Karl Leeser, Vince Burkhart | 2022-03-01 |
| 11258420 | Mutually induced filters | Aaron W. Logan, Hyungjoon Kim, Yaswanth Rangineni, Karl Leeser | 2022-02-22 |
| 11258421 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | George Thomas, Yaswanth Rangineni, Edward Augustyniak | 2022-02-22 |
| 11183406 | Control of wafer bow in multiple stations | Edward Augustyniak, David French, Yukinori Sakiyama, George Thomas | 2021-11-23 |
| 11038483 | Multiple-output radiofrequency matching module and associated methods | Karl Leeser, Bradford J. Lyndaker | 2021-06-15 |
| 10991550 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Eller Y. Juco, Karl Leeser, David French, Aaron Bingham, David Alan Metz +3 more | 2021-04-27 |
| 10879092 | Fault detection using showerhead voltage variation | Yaswanth Rangineni, Aaron Bingham, Tuan Nguyen | 2020-12-29 |
| 10665427 | RF generator for generating a modulated frequency or an inter-modulated frequency | Thomas Frederick | 2020-05-26 |
| 10666218 | Multiple-output radiofrequency matching module and associated methods | Karl Leeser, Bradford J. Lyndaker | 2020-05-26 |
| 10636624 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Karl Leeser, Vince Burkhart | 2020-04-28 |
| 10637427 | Mutually induced filters | Aaron W. Logan, Hyungjoon Kim, Yaswanth Rangineni, Karl Leeser | 2020-04-28 |