Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400833 | Methods and apparatus for processing a substrate | Abhishek Chowdhury, Jon C. Farr, Ravikumar Patil, Yi Zheng, Siqing Lu | 2025-08-26 |
| 12394601 | Impedance transformation in radio-frequency-assisted plasma generation | Thomas Frederick, Karl Leeser, Paul Konkola | 2025-08-19 |
| 12136938 | Closed-loop multiple-output radio frequency (RF) matching | Karl Leeser | 2024-11-05 |
| 11984298 | Impedance transformation in radio-frequency-assisted plasma generation | Thomas Frederick, Karl Leeser, Paul Konkola | 2024-05-14 |
| 11594397 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Karl Leeser, David French, Sunil Kapoor, Aaron Bingham, David Alan Metz +3 more | 2023-02-28 |
| 11557460 | Radio frequency (RF) signal source supplying RF plasma generator and remote plasma generator | Karl Leeser, Huatan Qiu | 2023-01-17 |
| D962881 | Semiconductor wafer processing apparatus | — | 2022-09-06 |
| D935424 | Semiconductor wafer processing tool | — | 2021-11-09 |
| 10991550 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Karl Leeser, David French, Sunil Kapoor, Aaron Bingham, David Alan Metz +3 more | 2021-04-27 |
| 10774423 | Tunable ground planes in plasma chambers | Karthik Janakiraman, Thomas Nowak, Juan Carlos Rocha-Alvarez, Mark Fodor, Dale R. Du Bois +4 more | 2020-09-15 |
| 10217610 | Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof | Neungho Shin, Yunsang Kim, Andrew D. Bailey, III | 2019-02-26 |
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Ganesh Balasubramanian, Amit Kumar BANSAL, Mohamad A. Ayoub, Hyung Joon Kim, Karthik Janakiraman +11 more | 2016-05-10 |
| 9275838 | Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof | Neungho Shin, Yunsang Kim, Andrew D. Bailey, III | 2016-03-01 |
| 7628863 | Heated gas box for PECVD applications | Soovo Sen, Inna Shmurun, Thomas Nowak, Nancy Fung, Brian Hopper +1 more | 2009-12-08 |
| 7094313 | Universal mid-frequency matching network | Visweswaren Sivaramakrishnan, Mario David Silvetti, Talex Sajoto | 2006-08-22 |
| 5994678 | Apparatus for ceramic pedestal and metal shaft assembly | Jun Zhao, Talex Sajoto, Leonid Selyutin, Charles Dornfest, Stefan Wolff +1 more | 1999-11-30 |