Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400833 | Methods and apparatus for processing a substrate | Abhishek Chowdhury, Jon C. Farr, Eller Y. Juco, Yi Zheng, Siqing Lu | 2025-08-26 |
| 12272591 | Friction stir welding in semiconductor manufacturing applications | Nick Ray Linebarger, Jr., Prahalad Narasinghdas Agarwal, Damodar Rajaram Shanbhag | 2025-04-08 |
| 11940819 | Mass flow controller based fast gas exchange | Abhishek Chowdhury, Arun Chakravarthy Chakravarthy, Jon C. Farr, Saravanan Chandrabalu, Prabhuraj Kuberan | 2024-03-26 |
| 11887884 | Pre-loaded bowl mechanism for providing a symmetric radio frequency return path | Tuan Nguyen | 2024-01-30 |
| 11887811 | Semiconductor processing chambers for deposition and etch | Khokan Chandra Paul | 2024-01-30 |
| 11881375 | Common substrate and shadow ring lift apparatus | Abhishek Chowdhury, Nataraj Bhaskar Rao, Siqing Lu | 2024-01-23 |
| 11699571 | Semiconductor processing chambers for deposition and etch | Khokan Chandra Paul, Vijet Patil, Carlaton WONG, Adam J. Fischbach, Timothy Franklin +2 more | 2023-07-11 |
| 11664247 | Dynamic interface for providing a symmetric radio frequency return path | — | 2023-05-30 |
| 10679827 | Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity | Gopu Krishna, Hanish Kumar Panavalappil Kumarankutty, Somil KAPADIA, Sonny Kunnakkat | 2020-06-09 |