Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10217610 | Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof | Eller Y. Juco, Yunsang Kim, Andrew D. Bailey, III | 2019-02-26 |
| 9275838 | Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof | Eller Y. Juco, Yunsang Kim, Andrew D. Bailey, III | 2016-03-01 |
| 8501283 | Methods for depositing bevel protective film | Patrick Chung, Yunsang Kim | 2013-08-06 |
| 7977123 | Arrangements and methods for improving bevel etch repeatability among substrates | Andreas Fischer, Fransisco Camargo | 2011-07-12 |
| 7435685 | Method of forming a low-K dual damascene interconnect structure | Gerardo Delgadino, Yan Ye, Yunsang Kim, Li-Qun Xia, Tzu-Fang Huang +6 more | 2008-10-14 |
| 7256134 | Selective etching of carbon-doped low-k dielectrics | Yunsang Kim, Heeyeop Chae, Joey Chiu, Yan Ye, Fang Tian +1 more | 2007-08-14 |
| 7132369 | Method of forming a low-K dual damascene interconnect structure | Gerardo Delgadino, Yan Ye, Yunsang Kim, Li-Qun Xia, Tzu-Fang Huang +6 more | 2006-11-07 |