| 11594400 |
Multi zone gas injection upper electrode system |
Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more |
2023-02-28 |
$186,503,000 |
| 10622195 |
Multi zone gas injection upper electrode system |
Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more |
2020-04-14 |
$56,328,000 |
| 10134600 |
Dielectric contact etch |
Leonid Romm, Alan J. Jensen, Xin Zhang |
2018-11-20 |
$25,153,000 |
| 10079154 |
Atomic layer etching of silicon nitride |
Daniel Le |
2018-09-18 |
$45,143,000 |
| 9779956 |
Hydrogen activated atomic layer etching |
Xin Zhang, Alan J. Jensen, Daniel Le |
2017-10-03 |
$16,041,000 |
| 9515156 |
Air gap spacer integration for improved fin device performance |
Paul R. Besser, Bart J. van Schravendijk, Yoshie Kimura, Harald Orkorn-Schmidt, Dengliang Yang |
2016-12-06 |
$22,040,000 |
| 9396961 |
Integrated etch/clean for dielectric etch applications |
Reza Arghavani, Shashank Deshmukh, Eric A. Hudson, Tom A. Kamp, Samantha Tan |
2016-07-19 |
$10,345,000 |
| 9263240 |
Dual zone temperature control of upper electrodes |
Alexei Marakhtanov, Rajinder Dhindsa, Ryan Bise, Lumin Li, Sang Ki Nam +5 more |
2016-02-16 |
$14,633,000 |
| 9040430 |
Method of stripping organic mask with reduced damage to low-K film |
John Nagarah |
2015-05-26 |
$23,824,000 |
| 8652298 |
Triode reactor design with multiple radiofrequency powers |
Rajinder Dhindsa, Alexei Marakhtanov, Eric A. Hudson, Bi-Ming Yen, Andrew D. Bailey, III |
2014-02-18 |
$19,223,000 |
| 8394722 |
Bi-layer, tri-layer mask CD control |
Robert C. Hefty |
2013-03-12 |
$11,235,000 |
| 8236188 |
Method for low-K dielectric etch with reduced damage |
Bing Ji, Kenji Takeshita, Andrew D. Bailey, III, Eric A. Hudson, Maryam Moravej +6 more |
2012-08-07 |
$20,329,000 |
| 8083963 |
Removal of process residues on the backside of a substrate |
Indrajit Lahiri, Teh-Tien Su, Sy-Yuan Brian Shieh, Ashok Sinha |
2011-12-27 |
$8,284,000 |
| 8048806 |
Methods to avoid unstable plasma states during a process transition |
Michael Kutney, Daniel J. Hoffman, Ezra Robert Gold, Ashok Sinha, Xiaoye Zhao +2 more |
2011-11-01 |
$26,300,000 |
| 7977245 |
Methods for etching a dielectric barrier layer with high selectivity |
Ying Xiao, Karsten Schneider |
2011-07-12 |
$5,718,000 |
| 7828987 |
Organic BARC etch process capable of use in the formation of low K dual damascene integrated circuits |
Jens Schneider, Ying Xiao |
2010-11-09 |
$8,686,000 |
| 7718543 |
Two step etching of a bottom anti-reflective coating layer in dual damascene application |
Zhilin Huang, Siyi Li |
2010-05-18 |
$6,103,000 |
| 7435685 |
Method of forming a low-K dual damascene interconnect structure |
Yan Ye, Neungho Shin, Yunsang Kim, Li-Qun Xia, Tzu-Fang Huang +6 more |
2008-10-14 |
$28,572,000 |
| 7432209 |
Plasma dielectric etch process including in-situ backside polymer removal for low-dielectric constant material |
Richard Hagborg, Douglas A. Buchberger, Jr. |
2008-10-07 |
$9,830,000 |
| 7309448 |
Selective etch process of a sacrificial light absorbing material (SLAM) over a dielectric material |
Hee Yeop Chae, Jeremiah T. Pender, Xiaoye Zhao, Yan Ye |
2007-12-18 |
$45,733,000 |
| 7300597 |
Selective etch process of a sacrificial light absorbing material (SLAM) over a dielectric material |
Hee Yeop Chae, Jeremiah T. Pender, Xiaoye Zhao, Yan Ye |
2007-11-27 |
$19,678,000 |
| 7276447 |
Plasma dielectric etch process including ex-situ backside polymer removal for low-dielectric constant material |
Indrajit Lahiri, Teh-Tien Su, Brian Sy-Yuan Sheih, Ashok Sinha |
2007-10-02 |
$69,542,000 |
| 7244313 |
Plasma etch and photoresist strip process with intervening chamber de-fluorination and wafer de-fluorination steps |
Yifeng Zhou, Chang-Lin Hsieh |
2007-07-17 |
$16,677,000 |
| 7132369 |
Method of forming a low-K dual damascene interconnect structure |
Yan Ye, Neungho Shin, Yunsang Kim, Li-Qun Xia, Tzu-Fang Huang +6 more |
2006-11-07 |
$19,896,000 |
| 6921727 |
Method for modifying dielectric characteristics of dielectric layers |
Kang-Lie Chiang, Mahmoud Dahimene, Xiaoye Zhao, Yan Ye, Hoiman Hung +2 more |
2005-07-26 |
$43,260,000 |
