Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594400 | Multi zone gas injection upper electrode system | Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam, Jim Rogers +6 more | 2023-02-28 |
| 10622195 | Multi zone gas injection upper electrode system | Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam, Jim Rogers +6 more | 2020-04-14 |
| 10431431 | Gas supply delivery arrangement including a gas splitter for tunable gas flow control | Mark Taskar, Iqbal Shareef, Anthony Zemlock, Nathan Kugland | 2019-10-01 |
| 10366869 | Active feedback control of subsystems of a process module | Scott Riggs, John C. Valcore, Jr., Eric A. Hudson, Ranadeep Bhowmick | 2019-07-30 |
| 10325759 | Multiple control modes | John C. Valcore, Jr., Eric A. Hudson | 2019-06-18 |
| 9396910 | Heat transfer plate for a showerhead electrode assembly of a capacitively coupled plasma processing apparatus | Sang Ki Nam, Rajinder Dhindsa | 2016-07-19 |
| 9263240 | Dual zone temperature control of upper electrodes | Alexei Marakhtanov, Rajinder Dhindsa, Lumin Li, Sang Ki Nam, Jim Rogers +5 more | 2016-02-16 |
| 9245718 | Showerhead electrode assembly in a capacitively coupled plasma processing apparatus | Sang Ki Nam, Rajinder Dhindsa | 2016-01-26 |
| 9018022 | Showerhead electrode assembly in a capacitively coupled plasma processing apparatus | Sang Ki Nam, Rajinder Dhindsa | 2015-04-28 |
| 7854143 | Optical fiber preform with improved air/glass interface structure | James W. Fleming, George J. Zydzik | 2010-12-21 |
| 7272287 | Optical fiber filter for suppression of amplified spontaneous emission | John Fini, Man F. Yan | 2007-09-18 |
| 6826342 | Temperature tuning of dispersion in photonic band gap fiber | Jayesh Jasapara | 2004-11-30 |