| 11594400 |
Multi zone gas injection upper electrode system |
Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam, Jim Rogers +6 more |
2023-02-28 |
| 10622195 |
Multi zone gas injection upper electrode system |
Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam, Jim Rogers +6 more |
2020-04-14 |
| 10431431 |
Gas supply delivery arrangement including a gas splitter for tunable gas flow control |
Mark Taskar, Iqbal Shareef, Anthony Zemlock, Nathan Kugland |
2019-10-01 |
| 10366869 |
Active feedback control of subsystems of a process module |
Scott Riggs, John C. Valcore, Jr., Eric A. Hudson, Ranadeep Bhowmick |
2019-07-30 |
| 10325759 |
Multiple control modes |
John C. Valcore, Jr., Eric A. Hudson |
2019-06-18 |
| 9396910 |
Heat transfer plate for a showerhead electrode assembly of a capacitively coupled plasma processing apparatus |
Sang Ki Nam, Rajinder Dhindsa |
2016-07-19 |
| 9263240 |
Dual zone temperature control of upper electrodes |
Alexei Marakhtanov, Rajinder Dhindsa, Lumin Li, Sang Ki Nam, Jim Rogers +5 more |
2016-02-16 |
| 9245718 |
Showerhead electrode assembly in a capacitively coupled plasma processing apparatus |
Sang Ki Nam, Rajinder Dhindsa |
2016-01-26 |
| 9018022 |
Showerhead electrode assembly in a capacitively coupled plasma processing apparatus |
Sang Ki Nam, Rajinder Dhindsa |
2015-04-28 |
| 7854143 |
Optical fiber preform with improved air/glass interface structure |
James W. Fleming, George J. Zydzik |
2010-12-21 |
| 7272287 |
Optical fiber filter for suppression of amplified spontaneous emission |
John Fini, Man F. Yan |
2007-09-18 |
| 6826342 |
Temperature tuning of dispersion in photonic band gap fiber |
Jayesh Jasapara |
2004-11-30 |