Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Active feedback control of subsystems of a process module

Active feedback control of subsystems of a process module

US Patent 10366869 · Granted Jul 30, 2019

Estimated economic value: $73,899,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

High aspect ratio dielectric etch with chlorine2025
Selective attachment to enhance SiO2:SiNx etch selectivity2025
Radiofrequency signal filter arrangement for plasma processing system2025
High density, modulus, and hardness amorphous carbon films at low pressure2025
Methods and systems for managing byproduct material accumulation during plasma-b2025
Profile optimization for high aspect ratio memory using an etch front metal cata2025
Low frequency RF generator and associated electrostatic chuck2025
Methods and apparatus for controlling plasma in a plasma processing system2025
Systems and methods for controlling a plasma sheath characteristic2025
Systems and methods for optimizing power delivery to an electrode of a plasma ch2025
High aspect ratio etch with infinite selectivity2025
Systems and methods for tuning a MHz RF generator within a cycle of operation of2025