| 11594400 |
Multi zone gas injection upper electrode system |
Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Sang Ki Nam, Jim Rogers +6 more |
2023-02-28 |
$186,503,000 |
| 10622195 |
Multi zone gas injection upper electrode system |
Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Sang Ki Nam, Jim Rogers +6 more |
2020-04-14 |
$56,328,000 |
| 9263240 |
Dual zone temperature control of upper electrodes |
Alexei Marakhtanov, Rajinder Dhindsa, Ryan Bise, Sang Ki Nam, Jim Rogers +5 more |
2016-02-16 |
$14,633,000 |
| 9111724 |
Apparatus and method for controlling plasma potential |
Douglas Keil, Reza Sadjadi, Eric A. Hudson, Eric H. Lenz, Rajinder Dhindsa |
2015-08-18 |
$12,105,000 |
| 8961145 |
Air compressor with shut-off mechanism |
Sean D. Hill |
2015-02-24 |
|
| 8674255 |
Apparatus and method for controlling etch uniformity |
Eric H. Lenz, Raj Dhindsa, Dave Trussell |
2014-03-18 |
$5,780,000 |
| 8393873 |
Air compressor with shut-off mechanism |
Sean D. Hill |
2013-03-12 |
|
| 8299390 |
Apparatus and method for controlling plasma density profile |
Rajinder Dhindsa, Felix Kozakevich, Dave Trussell |
2012-10-30 |
|
| 8114246 |
Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same |
Tuqiang Ni, Wenli Collison, David Hemker |
2012-02-14 |
$17,467,000 |
| 8080760 |
Apparatuses for adjusting electrode gap in capacitively-coupled RF plasma reactor |
Rajinder Dhindsa, Eric H. Lenz, Andy W. DeSepte |
2011-12-20 |
$9,941,000 |
| 8000082 |
Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same |
Rajinder Dhindsa, Eric H. Lenz, Felix Kozakevich |
2011-08-16 |
$5,000,000 |
| 7977242 |
Double mask self-aligned double patterning technology (SADPT) process |
S. M. Reza Sadjadi, Andrew R. Romano |
2011-07-12 |
$5,390,000 |
| 7977390 |
Method for plasma etching performance enhancement |
Bing Ji, Erik A. Edelberg, Takumi Yanagawa, Zhisong Huang |
2011-07-12 |
$5,390,000 |
| 7874807 |
Air compressor with shut-off mechanism |
Sean D. Hill |
2011-01-25 |
|
| 7838086 |
Magnetic enhancement for mechanical confinement of plasma |
Douglas Keil, Eric A. Hudson, Reza Sadjadi, Eric H. Lenz, Rajinder Dhindsa +1 more |
2010-11-23 |
$6,289,000 |
| 7749353 |
High aspect ratio etch using modulation of RF powers of various frequencies |
Camelia Rusu, Rajinder Dhindsa, Eric A. Hudson, Mukund Srinivasan, Felix Kozakevich |
2010-07-06 |
$10,439,000 |
| 7732728 |
Apparatuses for adjusting electrode gap in capacitively-coupled RF plasma reactor |
Rajinder Dhindsa, Eric H. Lenz, Andy W. DeSepte |
2010-06-08 |
$17,024,000 |
| 7683289 |
Apparatus and method for controlling plasma density profile |
Rajinder Dhindsa, Felix Kozakevich, Dave Trussell |
2010-03-23 |
$3,938,000 |
| 7632375 |
Electrically enhancing the confinement of plasma |
Andras Kuthi, Jisoo Kim, Eric H. Lenz, Rajindar Dhindsa, Reza Sadjadi |
2009-12-15 |
$22,060,000 |
| 7525787 |
Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same |
Rajinder Dhindsa, Eric H. Lenz, Felix Kozakevich |
2009-04-28 |
$19,456,000 |
| 7455748 |
Magnetic enhancement for mechanical confinement of plasma |
Douglas Keil, Eric A. Hudson, Reza Sadjadi, Eric H. Lenz, Rajinder Dhindsa +1 more |
2008-11-25 |
$24,944,000 |
| 7405521 |
Multiple frequency plasma processor method and apparatus |
Raj Dhindsa, S. M. Reza Sadjadi, Felix Kozakevich, Dave Trussell, Eric H. Lenz +5 more |
2008-07-29 |
$32,550,000 |
| 7169695 |
Method for forming a dual damascene structure |
Zhisong Huang, Reza Sadjadi |
2007-01-30 |
$14,926,000 |
| 7144521 |
High aspect ratio etch using modulation of RF powers of various frequencies |
Camelia Rusu, Rajinder Dhindsa, Eric A. Hudson, Mukund Srinivasan, Felix Kozakevich |
2006-12-05 |
$36,441,000 |
| 7105102 |
Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same |
Tuqiang Ni, Wenli Collison, David Hemker |
2006-09-12 |
$28,067,000 |
