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Home › Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same

Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same

US Patent 7525787 · Granted Apr 28, 2009

Estimated economic value: $19,456,000 ⓘ

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