Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272535 | Spectroscopic analysis method, method for fabricating semiconductor device using the same, and substrate process system using the same | Se Jin Oh, Doo Young Gwak, Tae Hyun Kim, Jae-Ho Jang, Jin Kyou Choi | 2025-04-08 |
| 12261021 | Apparatus and method for treating substrate | Hyun Bae Kim, Ji Hwan Kim, Hyong Seo YOON, Hyun Jae Lee, Myung Geun JEONG | 2025-03-25 |
| 11798788 | Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathode | Sunggil Kang, Sungyong Lim, Beomjin Yoo, Akira Koshiishi, Vasily Pashkovskiy +1 more | 2023-10-24 |
| 11664242 | Cleaning solution production systems and methods, and plasma reaction tanks | Beom Jin Yoo, Min Hyoung Kim, Won Hyuk Jang, Kyu-Hee Han, Young Do Kim +1 more | 2023-05-30 |
| 11594400 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Jim Rogers +6 more | 2023-02-28 |
| 11545372 | Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor device | Beom Jin Yoo, Min Hyoung Kim, Lu Siqing, Won Hyuk Jang, Kyu-Hee Han | 2023-01-03 |
| 11538697 | Substrate processing apparatus | Jang-Yeob Lee, Sungyeol Kim, Sunghyup Kim, Soonam Park, Siqing Lu | 2022-12-27 |
| 11127571 | Peripheral RF feed and symmetric RF return for symmetric RF delivery | Rajinder Dhindsa, James Rogers | 2021-09-21 |
| 11107705 | Cleaning solution production systems and methods, and plasma reaction tanks | Beom Jin Yoo, Min Hyoung Kim, Won Hyuk Jang, Kyu-Hee Han, Young Do Kim +1 more | 2021-08-31 |
| 10950414 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Akira Koshiishi, Kwangyoub Heo, Sunggil Kang, Beomjin Yoo, Sungyong Lim +1 more | 2021-03-16 |
| 10901007 | RF sensing apparatus of plasma processing chamber and plasma processing chamber including same | Young Do Kim, Sung Yong LIM, Chan Soo Kang, Do-Hoon Kwon, Min Ju Kim +3 more | 2021-01-26 |
| 10795262 | Method of manufacturing integrated circuit device | Jin Hong Park, Kyu-Hee Han, Jin Kim, Gwang-we Yoo | 2020-10-06 |
| 10622195 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Jim Rogers +6 more | 2020-04-14 |
| 10586686 | Peripheral RF feed and symmetric RF return for symmetric RF delivery | Rajinder Dhindsa, James Rogers | 2020-03-10 |
| 10522332 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Yeongkwang Lee, Sunggil Kang, Kwangyoub Heo, Kyuhee Han | 2019-12-31 |
| 10410874 | Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same | Beom Jin Yoo, Kwang Heo, Jehun Woo, Sang Heon Lee, Masahiko Tomita +1 more | 2019-09-10 |
| 10347468 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Yeongkwang Lee, Sunggil Kang, Kwangyoub Heo, Kyuhee Han | 2019-07-09 |
| 10048589 | Field guided post exposure bake application for photoresist microbridge defects | Ludovic Godet, Christine Y Ouyang | 2018-08-14 |
| 9996006 | Resist sensitivity and profile improvement via acid anion control during field-guided post exposure bake | Christine Y Ouyang, Ludovic Godet | 2018-06-12 |
| 9927709 | Resist sensitivity and profile improvement via acid anion control during field-guided post exposure bake | Christine Y Ouyang, Ludovic Godet | 2018-03-27 |
| 9864276 | Laser annealing and electric field | Christine Y Ouyang, Ludovic Godet | 2018-01-09 |
| 9829790 | Immersion field guided exposure and post-exposure bake process | Douglas A. Buchberger, Jr., Viachslav Babayan, Christine Y Ouyang, Ludovic Godet, Srinivas D. Nemani | 2017-11-28 |
| 9823570 | Field guided post exposure bake application for photoresist microbridge defects | Ludovic Godet, Christine Y Ouyang | 2017-11-21 |
| 9793126 | Ion to neutral control for wafer processing with dual plasma source reactor | Rajinder Dhindsa, Alexei Marakhtanov, Eric A. Hudson | 2017-10-17 |
| 9733579 | Tooling configuration for electric/magnetic field guided acid profile control in a photoresist layer | Peng Xie, Qiwei Liang, Ludovic Godet | 2017-08-15 |