Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9528185 | Plasma uniformity control by arrays of unit cell plasmas | Tae Seung Cho, Ludovic Godet, Srinivas D. Nemani | 2016-12-27 |
| 9514918 | Guard aperture to control ion angular distribution in plasma processing | Ludovic Godet | 2016-12-06 |
| 9480140 | Material modification by neutral beam source with selected collision angle | Ludovic Godet | 2016-10-25 |
| 9396910 | Heat transfer plate for a showerhead electrode assembly of a capacitively coupled plasma processing apparatus | Rajinder Dhindsa, Ryan Bise | 2016-07-19 |
| 9330927 | System, method and apparatus for generating pressure pulses in small volume confined process reactor | Rajinder Dhindsa, Harmeet Singh | 2016-05-03 |
| 9263240 | Dual zone temperature control of upper electrodes | Alexei Marakhtanov, Rajinder Dhindsa, Ryan Bise, Lumin Li, Jim Rogers +5 more | 2016-02-16 |
| 9253868 | Neutral beam source with plasma sheath-shaping neutralization grid | Ludovic Godet | 2016-02-02 |
| 9245718 | Showerhead electrode assembly in a capacitively coupled plasma processing apparatus | Rajinder Dhindsa, Ryan Bise | 2016-01-26 |
| 9230779 | Methods and apparatus for correcting for non-uniformity in a plasma processing system | Rajinder Dhindsa | 2016-01-05 |
| 9018022 | Showerhead electrode assembly in a capacitively coupled plasma processing apparatus | Rajinder Dhindsa, Ryan Bise | 2015-04-28 |
| 8911588 | Methods and apparatus for selectively modifying RF current paths in a plasma processing system | Rajinder Dhindsa, Alexei Marakhtanov | 2014-12-16 |
| 8898889 | Chuck assembly for plasma processing | Rajinder Dhindsa, Alexei Marakhtanov | 2014-12-02 |
| 7025690 | Golf club with transparent grip | — | 2006-04-11 |